A method for monitoring the reliability of wire bonding process
A wire bonding and reliability technology, applied in the direction of measuring devices, instruments, mechanical devices, etc., can solve problems such as high cost and complexity
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Embodiment 1
[0030] As a most basic embodiment of the present invention, a method for detecting the reliability of a wire bonding process is disclosed, comprising the following steps:
[0031] Step one, such as figure 1 Take the miniature force sensor 1 used to measure the pressure and tension between the metal wire 3 and the bonded surface, deposit two layers of thin film material layers 2 in the shape of steps on the working surface of the miniature force sensor 1, and one of them Layer 2 of the film material is the same as the pad material on the chip, and the other film material is the same as the lead frame material;
[0032] Step two, such as figure 1 , using the wire bonding process to be detected, using the metal wire 3 as the lead wire to bond the two layers of thin film material layers 2 on the working surface of the miniature force sensor 1, and recording the pressure and / or generated during the wire bonding process Pull data parameters;
[0033] Step 3, respectively apply co...
Embodiment approach
[0035] As a preferred embodiment of the present invention, a method for detecting reliability of a wire bonding process is disclosed, comprising the following steps:
[0036] (1) if figure 1 , take the miniature force sensor 1 that can measure tension and pressure; pressure refers to the need to apply a certain pressure on the bonding wire 3 and the surface to be bonded under a certain ultrasonic energy condition during the wire bonding process to promote the bond The bonding process is faster and the bonding is more reliable. This pressure is one of the important parameters of the wire bonding process; while the tension refers to the need to evaluate the bonding reliability after the wire bonding process is completed. Through the bonding wire 3 Quantitatively evaluate the tensile force between the bonded surface and the bonded surface.
[0037] The miniature force sensor 1 can be understood as a force sensor based on a micro-electro-mechanical system (MEMS, Micro-Electro-Mec...
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