Piezoelectric sensor, touch display device and manufacturing method

A piezoelectric sensor and piezoelectric film technology, applied in the field of sensors, can solve problems such as rough alignment and inapplicability, and achieve the effects of solving the problem of excessive time, reducing thickness and improving etching efficiency

Active Publication Date: 2019-06-21
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Usually, the patterning process with low precision is carried out by partial film sticking or film tearing. The above method can only perform rough alignment and is not suitable for large quantities of high-precision piezoelectric sensor products.

Method used

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  • Piezoelectric sensor, touch display device and manufacturing method
  • Piezoelectric sensor, touch display device and manufacturing method
  • Piezoelectric sensor, touch display device and manufacturing method

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Embodiment Construction

[0052] The application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. It should also be noted that, for ease of description, only parts related to the invention are shown in the drawings.

[0053] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.

[0054] Most of the piezoelectric films in commonly used piezoelectric sensors are made of polyvinylidene fluoride PVDF. PVDF is soluble in strong polar solvents, such as N-methylpyrrolidone (NMP) for etching, but its etching rate is very slow. The eclipse time is quite long, and the mass productio...

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Abstract

The application discloses a piezoelectric sensor, a touch display device and a manufacturing method. The piezoelectric sensor is sequentially provided with a first electrode layer, an insulating layerand a piezoelectric film layer, and further comprises a first spacer layer disposed on the insulating layer, wherein the first spacer layer is located in an area not provided with the piezoelectric film layer, and there is a certain distance between the first spacer layer and the piezoelectric film layer.

Description

technical field [0001] The present disclosure generally relates to the field of sensors, and more particularly, to a piezoelectric sensor, a touch display device and a manufacturing method. Background technique [0002] At present, most piezoelectric sensors use polyvinylidene fluoride PVDF material as the piezoelectric film layer. PVDF film has good chemical corrosion resistance, high temperature resistance, and oxidation resistance, but it also increases the difficulty of its patterning process. Usually, the patterning process with low precision is carried out by partial film sticking or film tearing. The above method can only perform rough alignment, and is not suitable for high-precision piezoelectric sensor products in large quantities. Contents of the invention [0003] In view of the above defects or deficiencies in the prior art, it is desired to provide a piezoelectric sensor, a touch display device and a manufacturing method with high precision and suitable for m...

Claims

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Application Information

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IPC IPC(8): H01L41/04H01L41/332G06F3/041
Inventor 牛菁周婷婷张方振孙双史鲁斌王锦谦米东灿
Owner BOE TECH GRP CO LTD
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