Method for fabricating array substrate, array substrate, display screen and display device

Abstract

The invention provides a method for fabricating an array substrate, an array substrate, a display screen and a display device. The method comprises steps of preparing an active material on a substrate, and forming an active layer by patterning the active material through a first mask plate; preparing a first insulating material on the active layer, weakly exposing the first insulating material bymultiplexing the first mask plate to form a gate insulating layer; preparing a first conductive material on the gate insulating layer, patterning the first conductive material through a second mask plate to form a gate layer; preparing a second insulating material on the gate layer, and weakly exposing the second insulating material by multiplexing the second mask plate to form an interlayer insulating layer. The method forms the gate insulating layer covering the upper surface and the sidewall of the active layer by multiplexing the first mask plate, and forms the interlayer insulating layercovering the upper surface and the sidewall of the gate layer by multiplexing the second mask plate, wherein the gate insulating layer and the interlayer insulating layer cover only necessary regions,thereby removing an inorganic film layer to the utmost extent and improving the overall bending property of the array substrate.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a method for manufacturing an array substrate, an array substrate, a display screen and a display device. Background technique [0002] The flexible AMOLED display uses LTPS (low temperature polysilicon process) technology to prepare the array substrate. The conventional process is a 9mask process as follows: active layer (PSI) - gate wiring layer (M1) - capacitor plate layer (M2) - overlay Hole layer (ILD) - source and drain wiring layer (M3) - planarization layer (PLA) - anode layer (Anode) - pixel definition layer (PDL) - support column layer (SPC). [0003] Folding display is one of the applications of flexible AMOLED display, and this technology requires outward (inward) bending of the display area (Area AA). However, the inventors have found that flexible AMOLED displays have poor bending properties. Contents of the invention [0004] Therefore, the technical p...

AI Technical Summary

Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of poor bending performance of flexible AMOLED displays in the prior art

Images