Spectrum detection device and manufacturing method thereof

Abstract

According to some embodiments of the present invention, a spectrum detection device is provided. The above-mentioned spectral detection device includes a substrate having a first photodiode and a second photodiode. The spectral detection device also includes an interference filter layer disposed above the first and second photodiodes, wherein the interference filter layer allows light with multiple wavelength bands to pass through. The spectrum detecting device also includes a first absorption filter layer disposed above the first and second photodiodes, wherein the first absorption filter layer allows the light with the wavelength in the first region to pass through. In addition, the above spectral detection device includes a second absorption type filter layer, which is arranged on the second photodiode, and the second absorption type filter layer allows light having a wavelength in the second region to pass through, and wherein the second region and The first zone overlaps.

Description

technical field [0001] The invention relates to a spectrum detection device, in particular to a spectrum detection device with an interference filter layer and an absorption filter layer. Background technique [0002] A traditional spectral detection device is an optical system composed of a plurality of optical elements, such as a beam splitter, a collimator, a focusing lens, and a line sensor. Beam splitters can be prisms or gratings. Collimators and focusing mirrors are configured to shorten the light path in the optical system. Therefore, the size and weight of the conventional spectral detection device are relatively large, and the manufacturing cost of the conventional spectral detection device is relatively expensive. [0003] In addition, because the line sensor of the traditional spectrum detection device is linear, the traditional spectrum detection device can only be used to measure the line spectrum of the sample, so that the application of the traditional spec...

AI Technical Summary

Problems solved by technology

Therefore, the size and weight of the conventional spectral detection device are relatively large, and the manufacturing cost of the conventional spectral detection device is relatively expensive

[0003] In addition, because the line sensor of the traditional spectrum detection device is linear, the traditional spectrum detection device can only be used to measure the line spectrum of the sample, which limits the application of the traditional spectrum detection device

[0004] Although the traditional spectral detection device has gradually become in line with the actual needs, it is not satisfactory everywhere. Therefore, it is necessary to provide a spectral detection device that can improve the existing problems

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