Non-contact optical component surface profile measuring device and method thereof

Abstract

The invention discloses a non-contact optical component surface profile measuring device and a method thereof. The device includes a host computer, an electronic control module, a probe supporting structure, an optical probe, a to-be-measured element, an element clamping device, a Z-axis electric translation stage, a dial indicator and an XY-axis electric translation stage; and the optical probe projects a focusing light spot on the surface of the to-be-measured element, and the light spot forms a three-hole bright spot through a three-hole diaphragm after being reflected back to an object lens. As the distance between the bright spots is related to the height position of the light spot, surface thicknesses can be obtained by collecting images in real time to calculate the distance betweenthe bright spots; in order to increase a height measuring range, the Z-axis electric translation stage can be used to move the to-be-measured element up and down, and the dial indicator can be used to measure the position of the element; and compared with traditional contact surface profile measuring systems, the device has the advantage of being non-contact, so that influences on the surface ofthe element can be avoided, and large measuring scope and high precision can be obtained.

Description

technical field [0001] The invention belongs to the field of optical measurement, in particular to a device and method for measuring the surface shape of a non-contact optical element. Background technique [0002] Optical components are widely used in daily life and various precision equipment, and their surface shape accuracy is a key factor affecting system performance. Design does not match. Therefore, high-precision optical components have strict requirements on the surface shape, and need to have good machining accuracy. Accurately measuring the lens surface shape during and after the processing is a key step to control the quality of the components. [0003] At present, the surface shape measurement methods of parts can be divided into two types: contact type and non-contact type. The contact method uses a mechanical probe to contact the surface of the part, and uses a grating ruler to measure the position of the probe to characterize the surface height, but mechani...

AI Technical Summary

Problems solved by technology

The contact method uses a mechanical probe to contact the surface of the part, and uses a grating ruler to measure the position of the probe to represent the surface height, but mechanical contact is likely to cause scratches on the surface of the component and affect the stray light of the optical system

Non-contact measurement is the development direction of component surface shape measurement technology. It has the advantages of high precision and no damage to the surface. However, it is different from the surface shape measurement of ordinary machinery and plastic parts. The surface of optical components is specular reflection, which is difficult for ordinary non-contact measurement methods. As a result, there is still a lack of a non-contact surface shape measurement device in the factory, and it is urgent to design a new measurement solution to solve the above problems

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