Method and device for measuring shape and profile parameters of laser confocal interference nuclear fusion target pill
A fusion target and confocal technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of non-destructive measurement of internal parameters of the target capsule, non-uniform value reference, and damage of the target capsule, so as to suppress the power of the light source of the system Drift, improve the freedom of optical path design, and suppress the effect of surface property differences
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Embodiment 1
[0053] Such as image 3 As shown, in the comprehensive measurement method of the shape and profile parameters of the laser confocal interference nuclear fusion target, the light source system 1 uses a point light source, and the divergent beam emitted by the point light source is collimated into a parallel beam through the collimator lens 2, and the parallel beam is separated by the beam splitter After A3 is reflected, it is divided into a transmitted illumination beam and a reflected illumination beam by the beam splitter B21, and the reflected illumination beam is converged into a point by the measurement objective lens 5 to illuminate the fusion target pellet 13 and be reflected. The reflected beam carrying the fusion target pellet 13 information passes through the measuring objective lens 5 to form a measuring beam, the measuring beam is divided into a transmitted measuring beam and a reflected measuring beam by the beam splitter B21, and the reflected measuring beam enters...
Embodiment 2
[0068] Such as Figure 4 As shown, in the laser confocal interference nuclear fusion nuclear fusion target capsule shape profile parameter comprehensive measurement device, the light source system 1, the beam splitter A3 placed along the light source exit direction, the beam splitter B21 placed sequentially along the reflection direction of the beam splitter A3 and the interference Arm 24, the measuring objective lens 5 placed sequentially along the reflection direction of the beam splitter B21, the confocal detection system 6 located in the opposite direction of the reflection direction of the beam splitter A3, the imaging converging mirror 22 and the interference CCD 23 located in the opposite direction of the reflection direction of the beam splitter B21 , an orthogonal drive system 14 located in the outgoing direction of the measurement objective lens 5 and whose rotation axis is coaxial with the measurement optical axis, a rotation drive system 15 whose rotation axis is pe...
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