Laser-differential-confocal-technology-based atomic force nuclear fusion pellet surface profile measuring method and device
A comprehensive measurement and fusion target technology, which is applied in the direction of measuring devices, optical devices, and material excitation analysis, can solve the problems of target capsule damage, insufficient comprehensive measurement capabilities, and inability to fully reveal the phenomenon and laws of target capsule structure changes. Effect of suppressing differences in surface properties
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Embodiment 1
[0053] like image 3 As shown, in the comprehensive measurement method for the shape and performance parameters of the laser confocal nuclear fusion target pellet, the light source system 1 uses a point light source. It is reflected by the dichroic beam splitter 21 again to form a reflected illumination beam, and the reflected illumination beam is converged into a point by the measurement objective lens 5 to illuminate the fusion target pellet 13, and the illumination light is reflected by the fusion target pellet 13 and excited to generate a Raman spectrum, carrying the fusion target The Raman spectrum and the reflected light beam of the pill 13 information pass through the measurement objective lens 5 to form a measurement light beam. The Raman spectrum in the measurement light beam passes through the dichroic beam splitter 21, and is received by the spectrum detection system 23 after being converged by the spectrum converging mirror 22; The reflected light in the beam is re...
Embodiment 2
[0067] like Figure 4 As shown, in the laser confocal nuclear fusion target capsule morphological performance parameter comprehensive measurement device, it includes a light source system 1, a beam splitter 3 placed along the light source exit direction, and a dichroic beam splitter 21 placed along the reflection direction of the beam splitter 3, The measurement objective lens 5 placed sequentially along the reflection direction of the dichroic beamsplitter 21, the confocal detection system 6 located in the opposite direction of the reflection direction of the beamsplitter 3, and the spectral converging mirror 22 placed in sequence in the opposite direction of the reflection direction of the dichroic beamsplitter 21 And the spectral detection system 23, the orthogonal drive system 14 located in the exit direction of the measurement objective lens 5 and the axis of rotation coaxial with the measurement optical axis, the rotation drive system 15 whose rotation axis is perpendicul...
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