Vertical laser interferometry device and method for measuring flat crystal absolute surface shape

A technology of laser interference and measuring equipment, which is applied in the direction of measuring devices, optical devices, instruments, etc., and can solve problems such as difficulty in ensuring flat crystal rotation accuracy, low efficiency, and troublesome operation

Active Publication Date: 2019-07-19
苏州慧利仪器有限责任公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this type of rotating platform is not only complex in structure, cumbersome to operate, and low in efficiency; m

Method used

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  • Vertical laser interferometry device and method for measuring flat crystal absolute surface shape
  • Vertical laser interferometry device and method for measuring flat crystal absolute surface shape
  • Vertical laser interferometry device and method for measuring flat crystal absolute surface shape

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Embodiment Construction

[0047] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0048] figure 1 It is a functional block diagram of a vertical laser interferometry device for measuring the absolute surface shape of a flat crystal in an embodiment of the present invention; figure 2 It is a schematic diagram of the three-dimensional structure of the vertical laser interferometry equipment used to measure the absolute surface shape of flat crystals in the embodiment of the present invention.

[0049] Such as figure 1 and figure 2 As shown, the vertical laser interferometry device 100 for measuring the absolute surface shape of a flat crystal in this embodiment includes a base 101 , a device main body 10 , a reference flat crystal supporting device 20 and a flat crystal rotating supporting device 30 .

[0050...

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Abstract

The invention provides a vertical laser interferometry device and method for measuring a flat crystal absolute surface shape, and adopts a method of three-plane mutual inspection to measure the absolute surface shape of three flat crystal working faces. The device comprises the following parts of a device main body containing a laser emitter, a filter, a beam splitter, a collimating lens, an imaging objective lens, an image detector and a processing portion; a reference flat crystal carrying device located directly under the collimating lens and disposed with the same optical axis of the collimating lens for carrying the flat crystal as a reference flat crystal; and a flat crystal rotation carrying device located directly under the reference flat crystal carrying device and disposed with the same optical axis of the reference flat crystal carrying device for carrying the flat crystal as the flat crystal to be tested, wherein the flat crystal rotation carrying device has a fixed disk, arotation carrying portion and a defining portion, and the defining portion is used for limiting the rotating disk to the first position when the rotating disk is switched to a first position and limiting the rotating disk to the second position when the rotating disk is switched to a second position.

Description

technical field [0001] The invention belongs to the technical field of laser interferometry equipment, and in particular relates to a vertical laser interferometry equipment and a measurement method for measuring the absolute surface shape of a flat crystal. Background technique [0002] Laser interferometry equipment, also known as laser interferometer, is a device that uses light interference technology to measure the shape information of optical parts such as flat crystals. Laser interferometry equipment has a horizontal measurement state and a vertical measurement state. The horizontal measurement state refers to the state where the reference flat crystal clamping device and the flat crystal clamping device to be measured are arranged horizontally. At this time, the reference flat crystal and the flat crystal to be measured are The crystals are placed vertically without self-weight deformation; the vertical measurement state refers to the state where the reference flat c...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 韩森李雪园庄锦程张凌华刘薇
Owner 苏州慧利仪器有限责任公司
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