Mask device, method for preparing OLED device and method for preparing OLED display panel

A mask plate and equipment technology, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problems of poor display of OLED display panels, prolonged evaporation process consumption, and easy generation of particles, etc., to achieve improved The effect of displaying quality, shortening consumption time, and avoiding pollution

Active Publication Date: 2019-07-19
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The process of replacing the mask plate takes a long time, resulting in a longer time-consuming evaporation process, and the machine is prone to produce particles during the process of replacing the mask plate, resulting in poor display of the OLED display panel

Method used

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  • Mask device, method for preparing OLED device and method for preparing OLED display panel
  • Mask device, method for preparing OLED device and method for preparing OLED display panel
  • Mask device, method for preparing OLED device and method for preparing OLED display panel

Examples

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Effect test

no. 1 example

[0039] figure 2 It is a schematic structural diagram of a masking device according to an embodiment of the present invention. Such as figure 2 As shown, the masking apparatus of the embodiment of the present invention includes a mask plate 20 and a driving mechanism 30 for driving the mask plate 20 to move. A plurality of mask patterns are disposed on the mask plate 20 . The driving mechanism 30 drives the mask plate 20 to move so that one of the mask patterns corresponds to a position to be evaporated, so as to perform different evaporation states.

[0040] In the masking equipment of the embodiment of the present invention, the mask plate 20 is provided with a plurality of mask patterns, and the mask plate 20 is driven to move by the driving mechanism 30, so that one of the mask patterns corresponds to the position to be evaporated, so as to perform different evaporation state. Therefore, when switching between different evaporation states, only the driving mechanism i...

no. 2 example

[0052] Based on the inventive concepts of the foregoing embodiments, the second embodiment of the present invention provides a method for preparing an OLED device, which uses the mask equipment in the above embodiment to evaporate and form an OLED device, and the method includes:

[0053] The driving mechanism drives the movement of the mask plate, so that the second hollow structure corresponds to the position of the OLED device, and the organic light-emitting layer is formed by evaporation;

[0054] The driving mechanism drives the movement of the mask plate, so that the first hollow structure corresponds to the position of the OLED device, and the cathode layer is formed by evaporation.

[0055] The method also includes:

[0056] When another OLED device is formed by evaporation, the driving mechanism drives the mask to move so that the physical shielding part corresponds to the position of the current OLED device, so as to shield the current OLED device.

no. 3 example

[0058] Based on the inventive concepts of the foregoing embodiments, the third embodiment of the present invention provides a method for preparing an OLED display panel, including:

[0059] providing a substrate;

[0060] The OLED device was prepared on the substrate by using the method of the above-mentioned embodiment.

[0061] The display panel can be any product or component with a display function such as a mobile phone, a tablet computer, a TV set, a monitor, a notebook computer, a digital photo frame, a navigator, and the like.

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PUM

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Abstract

The invention discloses a mask device, and a method for preparing an OLED device and a method for preparing an OLED display panel. The mask device comprises a mask plate and a driving mechanism used for driving the mask plate to move; a plurality of mask patterns are arranged on the mask plate; and the driving mechanism drives the mask plate to move for enabling one of the mask patterns to correspond to a to-be-evaporated position. The OLED device is prepared in an evaporation mode by adopting the mask device; when different evaporation states are switched, only the driving mechanism is required to drive the mask plate to move for enabling one of the mask patterns to correspond to the to-be-evaporated position, and different mask plates do not need to be replaced, so that the time consumption of replacing the mask plate is avoided, the time consumed in the evaporation process is shortened, and the evaporation efficiency is improved. Due to the fact that the mask plate no longer needs to be replaced, extra particles cannot be generated, so that the pollution of the particles to the preparation process is avoided, and the display quality of the display panel is improved.

Description

technical field [0001] The invention relates to the technical field of display panel manufacturing, in particular to a masking device, an OLED device and a method for preparing an OLED display panel. Background technique [0002] In the process of forming an Organic Light-Emitting Diode (OLED) device by vapor deposition, there are three states of vapor-deposited organic material, vapor-deposited metal material, and non-evaporated state, and these three states need to be alternately transformed, so , it is necessary to replace a different mask plate. The process of replacing the mask plate takes a long time, resulting in a longer time-consuming evaporation process. Moreover, the machine is prone to produce particles during the process of replacing the mask plate, resulting in poor display of the OLED display panel. Contents of the invention [0003] The purpose of the embodiments of the present invention is to provide a masking device, a method for manufacturing an OLED de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L27/32C23C14/04C23C14/24
CPCC23C14/042C23C14/24H10K59/10H10K71/166H10K71/60H10K71/00
Inventor 卜斌吴长晏
Owner BOE TECH GRP CO LTD
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