Probe card device and rectangular probe
A probe card and rectangular technology, which is applied in the field of probe cards, can solve the problems of high friction, collision between rectangular probes and probe holders, poor fixing effect, etc., and achieve the effect of improving mechanical strength and good cushioning effect
Active Publication Date: 2022-04-26
CHUNGHWA PRECISION TEST TECH
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- Application Information
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Problems solved by technology
However, the existing rectangular probes are made of a single material, so they cannot have both good current conduction properties and good mechanical strength properties
Furthermore, the existing probe card device often has the defects of collision between the rectangular probe and the probe seat, excessive friction force or poor fixation effect during the process of needle implantation or needle measurement.
Method used
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[0027] see Figure 1 to Figure 7 , which is an embodiment of the present invention. What needs to be explained first is that each embodiment corresponds to the relevant quantities and appearances mentioned in the accompanying drawings, which are only used to specifically illustrate the implementation of the present invention, so as to facilitate the understanding of the content of the present invention. , not to limit the protection scope of the present invention.
[0028] Such as figure 1 and figure 2 , the present embodiment discloses a probe card device 100 , which includes a probe base 1 and a plurality of rectangular probes 2 pierced through the probe base 1 . One end of a plurality of rectangular probes 2 is respectively abutted against a plurality of electrical contacts (not shown) on an adapter board; and the other end of a plurality of rectangular probes 2 can be used to test a The object under test (not shown in the figure, such as: semiconductor wafer).
[0029...
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The invention discloses a probe card device and a rectangular probe. The rectangular probe includes a metal needle body, an insulating film and an insulating tenon. The metal needle body includes a connection part, a needle measurement part and an intermediate section between the connection part and the needle measurement part. The insulating film covers the entire outer surface of the middle section. The insulating tenon is ring-shaped and surrounds at least part of the insulating film, the bottom edge of the insulating tenon is adjacent to the needle measuring part, the length of the insulating tenon is not greater than the length of the insulating film, and the thickness of the insulating tenon is greater than the thickness of the insulating film And it is more than 10 microns. Thereby, the rectangular probe can effectively improve the mechanical strength of the metal needle and provide a better cushioning effect of the metal needle without affecting the current conduction characteristics of the metal needle.
Description
technical field [0001] The invention relates to a probe card, in particular to a probe card device and a rectangular probe. Background technique [0002] When the semiconductor chip is tested, the test equipment is electrically connected to the object under test through a probe card device, and the test result of the object under test is obtained through signal transmission and signal analysis. The existing probe card device is provided with a plurality of probes arranged corresponding to the electrical contacts of the object under test, so that the plurality of probes can point-contact the corresponding electrical contacts of the object under test at the same time. [0003] In more detail, the probes of the conventional probe card device include rectangular probes manufactured by Microelectromechanical Systems (MEMS) technology, and their appearance can be shaped according to the designer's requirements. However, the existing rectangular probes are made of a single materia...
Claims
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IPC IPC(8): G01R1/073G01R31/28
CPCG01R1/07314G01R31/2886
Inventor 谢智鹏陈彦辰苏伟志
Owner CHUNGHWA PRECISION TEST TECH