Probe card device and its rectangular probe
A probe card and rectangle technology, applied in the field of probe cards, can solve the problems of inability to have both current conduction characteristics and mechanical strength characteristics, and achieve the effect of improving mechanical strength
Active Publication Date: 2020-09-08
CHUNGHWA PRECISION TEST TECH
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
However, the existing rectangular probes are made of a single material, so they cannot have both good current conduction properties and good mechanical strength properties
Method used
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Embodiment Construction
[0029] see Figures 1 to 4D , is an embodiment of the present invention. It should be explained first that this embodiment corresponds to the relevant quantities and shapes mentioned in the drawings, and is only used to specifically illustrate the implementation of the present invention, so as to facilitate the understanding of the content of the present invention. It is not intended to limit the protection scope of the present invention.
[0030] Such as Figure 1 to Figure 3A As shown, the present embodiment discloses a probe card device 100, which includes a probe base 10 and one side abutting against the probe base 10 (such as: figure 1 An adapter plate 20 on the top side of the probe base 10), and the other side of the probe base 10 (such as: figure 1 The bottom side of the probe base 10) can be used to test an object under test (not shown in the figure, such as a semiconductor wafer).
[0031] It should be noted that, in order to facilitate the understanding of this e...
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Abstract
The invention discloses a probe card device and a rectangular probe thereof. The rectangular probe comprises a metal probe body and a metal reinforced body, and the metal probe body comprises an intermediate segment, first and second connecting segments extending from two opposite ends of the intermediate segment respectively, a first contact segment extending from the first connecting segment todirection far from the intermediate segment, and a second contact segment extending from the second connecting segment to direction far from the intermediate direction. The metal reinforcing body is formed in the intermediate segment of the metal probe body in an integrated way, the Young's modulus of the metal reinforcing body is greater than that of the metal probe body, and the conductivity ofthe metal probe body is greater than that of the metal reinforcing body. The external diameter of the metal reinforcing body together with the intermediate segment is greater than that of the second connecting segment. Thus, the metal reinforcing body is formed in the intermediate segment of the metal probe body in the integrated way, so that the mechanical intensity of the metal probe body can beimproved effectively on the premise that the current conduction feature of the metal probe is not influenced.
Description
technical field [0001] The invention relates to a probe card, in particular to a probe card device and a rectangular probe. Background technique [0002] When the semiconductor chip is tested, the test equipment is electrically connected to the object under test through a probe card device, and the test result of the object under test is obtained through signal transmission and signal analysis. The existing probe card device is provided with a plurality of probes arranged corresponding to the electrical contacts of the object under test, so that the plurality of probes can point-contact the corresponding electrical contacts of the object under test at the same time. [0003] More specifically, the probes of the conventional probe card device include rectangular probes manufactured by Microelectromechanical Systems (MEMS) technology, and the shape of the probes can be shaped according to the designer's requirements. However, the existing rectangular probes are made of a sing...
Claims
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IPC IPC(8): G01R31/28G01R1/073
CPCG01R1/073G01R31/2886
Inventor 苏伟志谢智鹏
Owner CHUNGHWA PRECISION TEST TECH