Glass substrate manufacturing apparatus and manufacturing method
A technology for glass substrates and manufacturing devices, which is applied in lighting devices, semiconductor/solid-state device manufacturing, electroluminescent light sources, etc., and can solve problems such as easy sticking of glass substrates and damage to glass substrates
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
no. 1 approach 》
[0052] Below, refer to Figure 1 to Figure 4 A first embodiment of the present invention will be described. In addition, in this embodiment, the case where surface treatment is given to the back surface of the glass substrate cut out to predetermined size from the strip-shaped plate glass after shaping|molding as a plate glass is demonstrated as an example.
[0053] figure 1 The manufacturing apparatus 10 of the glass substrate which concerns on 1st Embodiment of this invention is shown. This manufacturing apparatus 10 is provided with the one main surface Pa ( figure 1 A surface treatment apparatus 11 for performing predetermined surface treatment, and a treatment tank 12 for accommodating the surface treatment apparatus 11 .
[0054] Among them, the surface treatment apparatus 11 is used to supply a processing gas Ga to one main surface Pa of the glass substrate P to perform a predetermined surface treatment, and includes an insertion passage 13 through which the glass su...
no. 2 approach 》
[0072] Figure 5 is a flow path configuration diagram of the manufacturing apparatus 30 according to the second embodiment, Image 6 The flowchart of the procedure of the manufacturing method (surface treatment and maintenance) using this manufacturing apparatus 30 is shown, respectively. like Figure 5 As shown, this manufacturing apparatus 30 includes a surface treatment apparatus 31 having a flow path structure different from that of the first embodiment. Specifically, in the exhaust passage 19, at a position upstream of the merging position P2 of the processing gas branch passage 21, A fourth on-off valve 26 that opens and closes the exhaust passage 19 is provided. In addition, since the structure other than this is the same as that of the manufacturing apparatus 10 (surface treatment apparatus 11) of 1st Embodiment, a detailed description is abbreviate|omitted.
[0073] In addition, if Image 6 As shown, the manufacturing method of the glass substrate of this embodime...
no. 3 approach 》
[0085] Next, mainly based on Figure 10 A third embodiment of the present invention will be described. In addition, the manufacturing apparatus used in this embodiment is Figure 5 The manufacturing apparatus 30 is shown.
[0086] like Figure 10 As shown, the manufacturing method of the glass substrate of this embodiment is provided with the surface treatment process S1, the maintenance process S2, and the restart preparation process S3 of the surface treatment. Since the surface treatment step S1 and the maintenance step S2 are the same as those of the second embodiment, the details of the surface treatment resumption preparation step S3 will be described below.
[0087] (S3) Preparation process for resumption of surface treatment
[0088] In this step S3, from the state at the time of the maintenance step S2 immediately before ( Figure 9 From the state shown), the second on-off valve 24 is first opened, the fourth on-off valve 26 is opened, and the third on-off valve ...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More