Detection method for detecting metal flatness by multi-point matrix type eddy current sensors
An eddy current sensor and flatness detection technology, which is applied in the direction of electromagnetic measuring devices, electric/magnetic roughness/irregularity measurement, etc., can solve the problem that multiple laser displacement sensors cannot be installed, and achieve rapid detection, simple structure, The effect of high installation density
Active Publication Date: 2019-08-13
随州武汉理工大学工业研究院
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Problems solved by technology
When using a laser displacement sensor to measure a metal surface, high-precision measurement results can be obtained. However, due to the influence of the dimensions and detection characteristics of the laser displacement sensor, multiple laser displacement sensors cannot be installed in a small space, and it is also affected by the surface of the object being inspected. Polarized light, light interference between sensors and other factors that will seriously affect the measurement accuracy
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[0033] The invention provides a method for detecting metal flatness by a multi-point matrix eddy current sensor. The technical solutions provided by the embodiments of the present invention are to solve the above-mentioned technical problems. In order to better understand the above-mentioned technical solutions, the above-mentioned technical solutions will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0034] The invention is a method for detecting metal flatness by a multi-point matrix eddy current sensor, comprising the following steps:
[0035] S1. Calibrate the sensor to be used with a multi-line graph;
[0036] S2. Install the sensor on the detection tooling. After the installation is completed, use the calibration block to calibrate the installation height of the sensor, and obtain the measured value between the sensor detection end face and the calibration block and the correction value converted accordi...
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The invention discloses a detection method for detecting metal flatness by multi-point matrix type eddy current sensors. According to the method, the sensors are firstly calibrated by using a multi-line chart; the sensors are mounted on an inspection tool; the mounting heights of the sensors are calibrated; the sensors are calibrated on a plane position on a to-be-detected workpiece by using a plane coordinate; the measured value of each sensor to the plane of the to-be-detected workpiece, actual distance values obtained through conversion and mounting height errors are formed into a spatial coordinate of each detection point; and a flatness deviation value of a measured surface is calculated by adoption of a multi-point least squares method. The detection method provided by the inventionhas the advantages of being high in detection precision, short in detection time, small in undulation angles of the eddy current sensors, and free of contact with the workpieces for measurement, can be applied to the surface flatness detection of various metal planes, and is suitable for the metal planes which have high reflectivity or cannot be contacted when the traditional mechanical contact measurement or laser displacement sensor measurement cannot be used.
Description
technical field [0001] The invention relates to the technical field of metal surface flatness detection, in particular to a method for detecting metal flatness by a multi-point matrix eddy current sensor. Background technique [0002] In the field of non-contact metal surface flatness measurement, laser displacement sensors are often used. When using a laser displacement sensor to measure a metal surface, high-precision measurement results can be obtained. However, due to the influence of the dimensions and detection characteristics of the laser displacement sensor, it is not possible to install multiple laser displacement sensors in a small space, and it is also affected by the surface of the object being inspected. Polarized light, optical interference between sensors, etc. will seriously affect the measurement accuracy. Contents of the invention [0003] In view of the above existing problems, the purpose of the present invention is to provide a multi-point matrix eddy...
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IPC IPC(8): G01B7/34
CPCG01B7/34
Inventor 李存荣邹振东余洋陈庚
Owner 随州武汉理工大学工业研究院