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Scanning electron microscope temperature regulation system and method

An electron microscope and temperature adjustment technology, which is applied in the direction of temperature control, circuit, discharge tube, etc. using electric means, which can solve the problems of narrow cooling temperature range and so on.

Pending Publication Date: 2019-08-16
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a scanning electron microscope temperature adjustment system that can improve the temperature control accuracy, so as to solve the problem that the existing way of cooling the sample stage easily leads to a narrow cooling temperature range

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  • Scanning electron microscope temperature regulation system and method

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Embodiment Construction

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0025] figure 1 It is a structural schematic diagram of the scanning electron microscope temperature regulation system of the present invention, such as figure 1 As shown, the scanning electron microscope temperature adjustment system provided by the embodiment of the present invention includes: a low-temperature cooling device, a first vacuum ch...

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Abstract

The invention relates to the technical field of scanning electron microscope sample stage cooling, and provides a scanning electron microscope temperature regulation system and method. The scanning electron microscope temperature regulation system includes a heating element, a first vacuum chamber and a second vacuum chamber, as well as a cryogenic cooling device and a sample stage. The cryogeniccooling device is used to provide cold for the sample stage, and the heating element is used to provide heat for the sample stage. The cryogenic cooling device is located inside the first vacuum chamber, and both the heating element and the sample stage are located inside the second vacuum chamber. According to the scanning electron microscope temperature regulation system, the cryogenic cooling device provides cold for the sample stage, the heating element provides heat for the sample stage, and wide temperature coverage and high-precision temperature control of the sample stage can be realized.

Description

technical field [0001] The invention relates to the technical field of scanning electron microscope sample stage cooling, in particular to a scanning electron microscope temperature adjustment system and method. Background technique [0002] Currently, scanning electron microscopes can usually only measure sample temperatures in room temperature environments. In recent years, some scanning electron microscope cold heads using liquid nitrogen as a cold source have also appeared. The specific cooling method is to introduce liquid nitrogen into the scanning electron microscope to directly cool the sample stage. There are several problems with this cooling method: first, the cooling temperature range is narrow, and the temperature can only be around 77K when using liquid nitrogen; second, the temperature control accuracy is not high, and it is difficult to achieve high-precision temperature control by controlling the flow of liquid nitrogen. Usually, the temperature fluctuates ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20H01J37/26G05D23/30
CPCH01J37/20H01J37/261G05D23/30
Inventor 陈六彪王俊杰崔晨顾开选
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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