Semiconductor package structure and preparation method thereof
A packaging structure and semiconductor technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve problems such as poor electrical properties and antenna performance, long transmission signal lines, and large packaging volume, etc., to achieve Good electrical and antenna performance, short transmission signal path, and low dielectric loss
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Embodiment 1
[0079] see figure 1 , the invention provides a method for preparing a semiconductor package structure, the method for preparing a semiconductor package structure includes the following steps:
[0080] 1) providing a base, and forming a sacrificial layer on the upper surface of the base;
[0081] 2) forming a rewiring layer on the upper surface of the sacrificial layer;
[0082] 3) forming an electrical connection structure on the upper surface of the rewiring layer, the electrical connection structure being electrically connected to the rewiring layer;
[0083] 4) forming a plastic seal layer on the upper surface of the rewiring layer, and the plastic seal layer seals the electrical connection structure;
[0084] 5) forming a first antenna layer on the upper surface of the plastic sealing layer, and the first antenna layer is electrically connected to the electrical connection structure;
[0085] 6) forming a frame structure on the upper surface of the plastic sealing layer...
Embodiment 2
[0146] Please combine Figure 2 to Figure 14 Continuing to refer to 15, the present invention also provides a semiconductor package structure, the semiconductor package structure comprising: a rewiring layer 12; a chip 21, the chip 21 is flip-chip bonded to the lower surface of the rewiring layer 12, and the The chip 21 is electrically connected to the rewiring layer 12; an electrical connection structure 13, the electrical connection structure 13 is located on the upper surface of the rewiring layer 12, and the electrical connection structure 13 is electrically connected to the rewiring layer 12 Connection; the plastic sealing layer 14, the plastic sealing layer 14 is located on the upper surface of the rewiring layer 12, and the plastic sealing layer 14 plastic seals the electrical connection structure 13; the first antenna layer 15, the first antenna layer 15 Located on the upper surface of the plastic sealing layer 14, and the first antenna layer 15 is connected to the ele...
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