Strain gauge with mechanically decoupled temperature sensor
A technology of temperature sensors and strain gauges, which is applied to parts of thermometers, thermometers, and thermometers using electric/magnetic elements that are directly sensitive to heat, and can solve problems such as reduced sensitivity and low metering coefficients
Active Publication Date: 2019-08-27
STMICROELECTRONICS SRL
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
However, metal sensing elements have a relatively low gage coefficient, which reduces the sensitivity of the gage
Method used
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example 1
[0098] Example 1. In one embodiment, a semiconductor device includes: a strain gauge on a substrate, the strain gauge configured to measure a stress of the substrate; and a temperature sensor disposed within the substrate, the temperature sensor being connected to the stress of the substrate Decoupling.
example 2
[0099]Example 2. The semiconductor device of example 1, wherein the temperature sensor is attached to the substrate by silicon springs.
example 3
[0100] Example 3. The semiconductor device of one of the preceding examples, wherein the substrate has an opening, and wherein the temperature sensor is in the opening and is attached to the substrate by a silicon spring.
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Embodiments of the application relate to a strain gauge with a mechanically decoupled temperature sensor. A semiconductor device includes a strain gauge on a substrate, the strain gauge configured tomeasure a stress of the substrate; and a temperature sensor disposed within the substrate, the temperature sensor being decoupled from the stress of the substrate.
Description
technical field [0001] The present invention relates generally to systems and methods for strain gauges, and in particular embodiments, to semiconductor strain gauges with temperature compensation. Background technique [0002] Strain gauges are commonly used to sense stress (eg, pressure, force, torque) in a subject material. A strain gauge has a strain sensing element attached or adhered to a host material. As the body material deforms, the resistance of the sensing element changes proportionally to the deformation it undergoes. The change in electrical resistance in the sensing element as it deforms (eg, is compressed or elongated) is measured and used to calculate the strain in the subject material. Poor-type strain gauges with metallic sensing elements are commonly used to measure strain. However, metal sensing elements have a relatively low gauging coefficient, which reduces the sensitivity of the gage. With semiconductor strain gauges that use semiconductor materi...
Claims
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Patent Timeline
Login to View More IPC IPC(8): G01L1/22G01K7/16G01K1/14
CPCG01L1/2281G01K7/16G01K1/14G01L9/0042G01L9/0054G01L9/045G01L19/0092G01B7/22G01D5/16G01L1/04G01L1/06G01L1/18G01L1/2293
Inventor D·卡尔塔比亚诺
Owner STMICROELECTRONICS SRL