Plane mirror surface shape detection method, device, equipment and computer-readable storage medium
A detection method and technology of plane mirrors, which are applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of high cost of large-diameter plane interferometers and high cost of surface shape data detection of large-diameter plane mirrors, so as to improve detection accuracy and reduce The effect of detecting cost and improving economy
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[0047] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0048] The terms "first", "second", "third" and "fourth" in the specification and claims of this application and the above drawings are used to distinguish different objects, rather than to describe a specific order . Furthermore, the terms "comprising" and "having", and any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device compris...
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