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Plane mirror surface shape detection method, device, equipment and computer-readable storage medium

A detection method and technology of plane mirrors, which are applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of high cost of large-diameter plane interferometers and high cost of surface shape data detection of large-diameter plane mirrors, so as to improve detection accuracy and reduce The effect of detecting cost and improving economy

Active Publication Date: 2020-06-09
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

[0004] Related technologies usually use a plane interferometer to measure the surface shape data of a plane mirror. The measurement of the surface data of a large-diameter plane mirror requires the use of a large-diameter plane interferometer. With the gradual increase in the diameter of the plane mirror, the diameter of the plane interferometer also urgently needs to be matched. , but the cost of a large-aperture plane interferometer is relatively high, resulting in a relatively high cost of surface shape data detection for a large-aperture plane mirror

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  • Plane mirror surface shape detection method, device, equipment and computer-readable storage medium

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[0047] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0048] The terms "first", "second", "third" and "fourth" in the specification and claims of this application and the above drawings are used to distinguish different objects, rather than to describe a specific order . Furthermore, the terms "comprising" and "having", and any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device compris...

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Abstract

The embodiment of the invention discloses a surface shape detection method, device and equipment for a plane mirror, and a computer readable storage medium. The method comprises the following steps that: segmenting a plane mirror to be detected into a plurality of discrete sub-apertures, and utilizing a Ritchey-Common method to measure the surface shape data of each discrete sub-aperture; according to each piece of surface shape data and the preset shape of each discrete sub-aperture, calculating an ideal point spread function and a practical point spread function under a diffraction limit, combining with the seeing data of a detection environment to calculate standardized point source sensitivity estimation information, and utilizing the estimated standardized point source sensitivity tocarry out global rigid body displacement optimization on each discrete sub-aperture until an optimization cutoff condition is met; and on the basis of the surface shape data of the discrete sub-aperture which meets the optimization cutoff condition, obtaining a characteristic peak value corresponding to each item of a wave surface Zernike polynomial, according to target frequency band information,determining a substrate amount, and taking the substrate amount as the surface shape data of the plane mirror to be detected in the target frequency band to realize the high-efficiency and high-accuracy surface shape splicing detection of the large-caliber plane mirror.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of surface shape detection, and in particular, to a method, device, equipment, and computer-readable storage medium for surface shape detection of a plane mirror. Background technique [0002] Traditional large-aperture telescopes usually use flat mirrors to bend the light path and switch the focus, such as the 8.2m-caliber European Southern Observatory's Very Large Telescope (VLT) with 1.3m×0.8m triple mirrors. With the increase in the complexity of the next-generation large-aperture telescope system, the functional requirements for the reentrant plane mirror also increase accordingly. Based on this situation, the integrated detection technology of the plane mirror should also be refined according to different target frequency bands. [0003] For example, in the Large Sky Area Multi-Object Fiber Spectroscopic Telescope (LOMOST) with a diameter of 4m, the MA hexagonal mirror with a diag...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 安其昌吴小霞林旭东王建立陈涛曹海峰
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI