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Light-emitting diode driving backplane, manufacturing method thereof, and display device

A technology for light-emitting diodes and driving backplanes, which is applied in transistors, semiconductor/solid-state device components, semiconductor devices, etc., and can solve problems such as transfer process affecting TFT characteristics.

Active Publication Date: 2021-03-23
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the embodiments of the present invention is to provide a light-emitting diode driving backplane, its preparation method, and a display device, so as to overcome the problem in the prior art that the transfer process affects the TFT characteristics

Method used

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  • Light-emitting diode driving backplane, manufacturing method thereof, and display device
  • Light-emitting diode driving backplane, manufacturing method thereof, and display device
  • Light-emitting diode driving backplane, manufacturing method thereof, and display device

Examples

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no. 1 example

[0056] Figure 5 It is a structural schematic diagram of the first embodiment of the LED driving backplane of the present invention. Such as Figure 5 As shown, the main structure of the light-emitting diode driving backplane in this embodiment includes a substrate 10 and a driving structure layer disposed on the substrate 10. The driving structure layer includes a thin film transistor, a second gate and a common electrode, wherein the thin film transistor includes an active layer , a first grid, a source electrode and a drain electrode, and a first metal strip as a stress relief structure. Specifically, the light-emitting diode driving backplane in this embodiment includes:

[0057] base 10;

[0058] a barrier layer 11 disposed on the substrate 10;

[0059] The active layer 12 is disposed on the barrier layer 11 and includes a channel region and doped regions located on both sides of the channel region;

[0060] a first insulating layer 13 covering the active layer 12; ...

no. 2 example

[0087] Figure 14 It is a structural schematic diagram of the second embodiment of the LED driving backplane of the present invention. This embodiment is an extension based on the aforementioned first embodiment, such as Figure 14 As shown, the main structure of the light-emitting diode driving backplane in this embodiment is the same as that of the aforementioned first embodiment, including a substrate 10 and a driving structure layer disposed on the substrate 10, and the driving structure layer includes a thin film transistor, a second gate and a common electrode , wherein the thin film transistor includes an active layer, a first gate, a source electrode and a drain electrode, and also includes a stress relief structure. Different from the aforementioned first embodiment, the stress relief structure of this embodiment is two second metal strips 40, and the two second metal strips 40 are arranged on the first insulating layer 13 and located on the two sides of the first ga...

no. 3 example

[0092] On the basis of the foregoing embodiments and based on the technical concept of the present invention, the stress relief structure of the embodiment of the present invention can also be expanded in many ways. For example, although the above-mentioned first embodiment has been described by setting a first metal strip on both sides of the first gate as an example, if the process conditions permit, the side surfaces of the first gate can also be arranged along the first gate and Two or more first metal strips are sequentially arranged in the direction of the first via hole to further reduce the stress value at the corner of the edge of the first gate by creating multiple stress concentration points at the same time. Similarly, the aforementioned second embodiment can also be extended to two or more first metal strips, and the stress concentration at the edge corners of the first gate can be further eliminated through multiple arches for relieving pressure. As another examp...

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Abstract

Embodiments of the present invention provide an LED driving backplane, a manufacturing method thereof, and a display device. The light-emitting diode driving backplane includes a substrate and a thin film transistor arranged on the substrate; the thin film transistor includes: an active layer including a channel region and a doped region arranged on the substrate, covering the first active layer of the active layer An insulating layer, a first gate disposed on the first insulating layer; the stress relief structure includes metal strips located on both sides of the first gate, and the metal strips are the same as the first gate layer settings, and the material is the same. The present invention reduces the change degree of the interface state and bulk state of the active layer channel region by setting the stress relief structure in the thin film transistor, reduces the change degree of the carrier transmission state and the transmission path, and then suppresses the off-state current I off The increase and the increase of the sub-threshold swing SS effectively overcome the problem in the prior art that the transfer process affects the TFT characteristics.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a light-emitting diode driving backplane, a preparation method thereof, and a display device. Background technique [0002] Semiconductor light-emitting diode (Light Emitting Diode, LED) technology has been developed for nearly three decades, from the initial solid-state lighting power supply to the backlight source in the display field and then to the LED display screen, providing a solid foundation for its wider application. Among them, with the development of chip manufacturing and packaging technology, sub-millimeter light-emitting diode (Mini Light Emitting Diode, Mini LED) display and micro light-emitting diode (Micro Light Emitting Diode, Micro LED) display have gradually become a hot spot for LED-driven backplanes. . Compared with Organic Light Emitting Diode (OLED) display technology, Micro LED, a new generation of display technology, has higher brightness, better lumi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/15H01L29/786H01L33/00
CPCH01L27/15H01L29/78609H01L33/0095H01L25/0753H01L25/167H01L23/562H01L27/124H01L27/1259
Inventor 李海旭
Owner BOE TECH GRP CO LTD