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Scanning probe microscope and surface image correction method

A surface image and scanning probe technology, applied in scanning probe technology, capturing objects visible under the microscope, acquiring/recognizing microscopic objects, etc., can solve the problems of brightness deviation and inability to obtain surface images, etc., and achieve the goal of simplifying the setting operation Effect

Active Publication Date: 2022-03-11
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] When the sample is not installed horizontally, there is a problem that the surface that should be horizontal is inclined, and the surface image of the sample has a deviation in brightness due to the inclination, so that an accurate surface image cannot be obtained.

Method used

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  • Scanning probe microscope and surface image correction method
  • Scanning probe microscope and surface image correction method
  • Scanning probe microscope and surface image correction method

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Experimental program
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Embodiment Construction

[0039] 1. Structure of Scanning Probe Microscope

[0040] figure 1 It is a schematic diagram showing a configuration example of a scanning probe microscope according to an embodiment of the present invention. This scanning probe microscope (SPM) includes a cantilever 1, a light irradiation unit 2, a beam splitter 3, a mirror 4, a light detection unit 5, a sample stage 6, etc., and by moving the cantilever 1 along the surface of the sample S, A surface image (concavo-convex image) of the sample S placed on the sample stage 6 can be obtained.

[0041] The light irradiation unit 2 includes, for example, a laser light source such as a semiconductor laser, and irradiates light toward the cantilever 1 . The light irradiated from the light irradiation unit 2 enters the cantilever 1 via the beam splitter 3 . The cantilever 1 has a reflective surface 11 , and the reflected light on the reflective surface 11 is reflected by the reflective mirror 4 and received by the photodetector 5...

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PUM

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Abstract

Provided are a scanning probe microscope and a surface image correction method capable of simplifying sample setting operations. The inclination correction processing unit performs image processing for correcting the inclination of the surface image in the Z direction intersecting the X direction and the Y direction on the surface image of the sample acquired by scanning by the scan processing unit. The inclination correction processing unit extracts a plurality of pixels on a straight line along a predetermined direction from the surface image, and corrects the inclination of the surface image based on the brightness of each extracted pixel. The inclination correction processing unit performs image processing in the case of correcting the surface image of a sample having a flat surface in at least one direction (P direction) intersecting the X direction and the Y direction so that the predetermined direction (straight line ( 28)) substantially coincides with the one direction (P direction), and a plurality of pixels are extracted along the one direction (P direction).

Description

technical field [0001] The present invention relates to a scanning probe microscope equipped with a cantilever that relatively moves along the surface of a sample, and a surface image correction method for correcting a surface image of a sample acquired by the scanning probe microscope. Background technique [0002] For example, in the case of an optical lever system scanning probe microscope, the probe of the cantilever is moved along the surface of the sample, and the surface image (concave-convex image) of the sample can be obtained by detecting the deformation of the cantilever (for example, refer to the following Patent Document 1). Such a scanning probe microscope includes a light irradiation unit that irradiates light toward a cantilever, and a light detection unit that receives reflected light from the cantilever. [0003] When the sample is not installed horizontally, there is a problem that the surface that should be horizontal is inclined, and the surface image o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q40/00G06V10/20
CPCG01Q40/00G01Q30/06G06V20/693G06V10/247G06V10/20
Inventor 平出雅人
Owner SHIMADZU SEISAKUSHO CO LTD