Evaporation hood and evaporation equipment

A technology of evaporation and equipment, which is applied in the field of evaporation cover and evaporation equipment, can solve the problems of efficiency restricting the industrialization of display panels, etc., and achieve the effects of improving the stability of use, improving the efficiency of evaporation, and avoiding pollution

Active Publication Date: 2021-11-02
YUNGU GUAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the method of vacuum deposition or vacuum thermal evaporation is mainly used. After the material to be filmed is evaporated or sublimated by heating, it is condensed or deposited on the surface of the low-temperature workpiece or the substrate to be evaporated to form the film structure of OLED. However, the presence of impurities Factors such as low efficiency and low efficiency restrict the industrialization of display panels

Method used

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  • Evaporation hood and evaporation equipment
  • Evaporation hood and evaporation equipment
  • Evaporation hood and evaporation equipment

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Embodiment Construction

[0048] The characteristics and exemplary embodiments of various aspects of the present invention will be described in detail below. In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only configured to explain the present invention, not to limit the present invention. It will be apparent to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention.

[0049] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation...

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Abstract

The invention discloses an evaporation cover and evaporation equipment. The evaporation cover is used for the evaporation equipment. The evaporation equipment includes an evaporation source. The evaporation cover includes: a shielding member, which has a shielding surface facing the evaporation source; The cleaning part is arranged between the shielding surface and the evaporation source, and the cleaning part can move relative to the shielding surface to clean the shielding surface. The vapor deposition cover provided by the present invention can clean impurities on the vapor deposition cover in time, improve the use stability of the vapor deposition cover, avoid contamination of vapor deposition equipment, and improve the vapor deposition efficiency of the substrate to be vapor deposited.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to an evaporation cover and evaporation equipment. Background technique [0002] With the progress of science and technology and the development of society, people have higher and higher requirements for display devices, which further leads to higher and higher standards for devices and processes for manufacturing display devices. Organic Light-Emitting Diode (OLED) has the advantages of self-illumination, no need for backlight, high contrast, thin thickness, wide viewing angle, simple structure and manufacturing process, etc., and OLED display panels are widely used. [0003] One of the most important links in the production process of OLED display panels is to coat the organic layer on the substrate to be evaporated to form the key light-emitting display unit. The development of high-precision coating technology is the key to restricting the commercialization of OLEDs. At pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/56
CPCC23C14/24C23C14/564
Inventor 贾松霖陈营营
Owner YUNGU GUAN TECH CO LTD
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