Measuring tool for horizontal crystal orientation positioning of crystal bar
A measuring tool and horizontal technology, applied in measuring devices, mechanical measuring devices, angle/taper measurement, etc., can solve problems such as inability to physically measure and position, and achieve cost-saving effects
Pending Publication Date: 2019-09-20
MCL ELECTRONICS MATERIALS
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Problems solved by technology
[0003] In order to solve the above problems, the present invention provides a measurement tool for positioning the horizontal crystal orientation of crystal rods, which makes up for the defect that the horizontal crystal orientation of Notch corner silicon single crystal rods cannot be physically measured and positioned
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[0027] In order for those skilled in the art to better understand the technical solutions provided by the present invention, the following will be described in conjunction with specific embodiments.
[0028] figure 1 It is a structural schematic diagram of the present invention. When in use, the present invention is directly placed on the head end face of the ingot, because the diameter and profile of the end face are consistent with the edge diameter of the measuring tool, so the use of the present invention does not need to find the center point of the end face. After the invention coincides with the end face and the horizontal bubble maintains a horizontal position, it can be read directly. At this time, the deflection angle of Notch is the β vertical deflection angle value of the ingot, and the β vertical deflection angle determines the horizontal crystal orientation value of the ingot. Very intuitive and convenient.
[0029] A measuring tool for positioning the horizonta...
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The invention provides a measuring tool for horizontal crystal orientation positioning of a crystal bar. The measuring tool comprises an adjusting device and a measuring device, wherein the measuring device comprises a measuring disc, a horizontal bubble and a positioning rod, a channel allowing the positioning rod to pass through is arranged inside the measuring disc, the adjusting device comprises an adjusting mechanism, a positioning mechanism and a connecting mechanism, the adjusting mechanism comprises a fixing column, an adjusting nut, a ring sleeve and a fixing ring, the fixing column is cylindrical, an annular groove is formed in the outer wall of the adjusting nut, the ring sleeve is arranged inside the annular groove, and the ring sleeve is connected with the connecting mechanism by means of the fixing ring; the connecting mechanism comprises a connecting rod and a connecting ring, and the connecting rod is hinged to the fixing ring and the positioning mechanism by means of the connecting ring; and the positioning mechanism comprises a stop block and a fixed hinge support, the stop block is connected to the connecting ring by means of the fixed hinge support, and the bottom surface of the stop block is further connected with the positioning rod. The measuring tool compensates for the defect that the horizontal crystal orientation of a Notch angle silicon single crystal bar cannot be physically measured and positioned.
Description
technical field [0001] The invention belongs to the field of monocrystalline silicon wafer production, and in particular relates to a measuring tool for positioning the horizontal crystal orientation of crystal rods. Background technique [0002] The present invention is applied in the field of single crystal silicon wafer production. Before the single crystal silicon rod is cut into single crystal silicon wafers, it is necessary to perform directional bonding on the crystal rod on the sticking table according to the two deflection angles calculated by the equipment. The deflection angle, one is the α horizontal deflection angle, which determines the vertical crystal orientation of the crystal rod, and the other is the β vertical deflection angle, which determines the horizontal crystal orientation of the crystal rod, and the β deflection angle of the sticking table is electronically controlled by the rotation of the encoder. According to the measurement, most of the monocry...
Claims
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IPC IPC(8): G01B5/24G01B5/00
CPCG01B5/24G01B5/0002Y02E30/30
Inventor 张亮崔小换张倩
Owner MCL ELECTRONICS MATERIALS