Efem efem efem and gas replacement method in efem

A non-reactive gas and automatic device technology, applied in the field of EFEM, can solve problems such as interference with delivery devices
CN110277339APending Publication Date: 2019-09-24SHINKO ELECTRIC CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHINKO ELECTRIC CO LTD
Publication Date
2019-09-24

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Abstract

The invention provides an EFEM and a gas replacement method in the EFEM. In the type of EFEM for circulating non-active gas in a housing, cost increase is suppressed and furthermore discharging of particles into a conveying chamber is suppressed. The EFEM has a conveying chamber and a regression channel, thereby forming a nitrogen supplying cycle. The conveying chamber is used for making the particle-eliminated FFU-purified nitrogen flow in a preset direction. The regression channel makes the nitrogen return from the downstream side of the conveying chamber to an FFU. The EFEM is provided with a conveying robot which is configured in a conveying chamber and performs a preset action in a state that a wafer is kept. The conveying robot is provided with components of a housing component which is provided with an opening; an arm mechanism which is configured outside the housing component and is used for keeping the wafer; a supporting column which supports the arm mechanisms and penetrates through the opening; and a driving mechanism which is accommodated in the housing component and is used for driving the supporting column, wherein the conveying robot has a connecting channel for connecting the housing component with the regression channel.
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Description

technical field

[0001] The invention relates to an EFEM (Equipment Front End Module, Equipment Front End Module) capable of circulating inert gas. Background technique

[0002] Patent Document 1 discloses an EFEM that combines a processing device that performs predetermined processing on semiconductor substrates (wafers) and a FOUP (Front-Opening Unified Pod) that accommodates wafers. Handover of wafers between them. The EFEM includes a housing, a loading port, and a transport device. The housing is formed with a transport chamber for transporting wafers. There are multiple loading ports arranged on the outside of the housing, and are used to place FOUPs separately. The transport device is used to transport wafers. The wafers are transported by walking on the extended track in the room.

[0003] In the past, oxygen, moisture, etc. in the transfer chamber had little influence on semiconductor circuits manufactured on wafers, but in recent years, the above influence has beco...

Claims

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