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Efem efem efem and gas replacement method in efem

A non-reactive gas and automatic device technology, applied in the field of EFEM, can solve problems such as interference with delivery devices

Pending Publication Date: 2019-09-24
SHINKO ELECTRIC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, simply installing sensor equipment and the like in the conveying chamber may interfere with the moving conveying device.

Method used

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  • Efem efem efem and gas replacement method in efem
  • Efem efem efem and gas replacement method in efem
  • Efem efem efem and gas replacement method in efem

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Embodiment Construction

[0041] Next, refer to Figure 1 to Figure 8 Embodiments of the present invention will be described. In addition, for the convenience of explanation, the figure 1 The directions shown are assumed to be front-back, left-right, and left-right directions. That is, the direction in which the EFEM (Equipment Front End Module) 1 and the substrate processing apparatus 6 are arranged is referred to as the front-back direction. Let the EFEM 1 side be the front, and the substrate processing apparatus 6 side be the rear. The direction in which the plurality of loading ports 4 are arranged and perpendicular to the front-rear direction is referred to as the left-right direction. In addition, let the direction perpendicular to both the front-back direction and the left-right direction be the up-down direction.

[0042] (Schematic structure of EFEM and its surroundings)

[0043] First, use figure 1 and figure 2 The schematic structure of EFEM 1 and its surroundings will be described...

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Abstract

The invention provides an EFEM and a gas replacement method in the EFEM. In the type of EFEM for circulating non-active gas in a housing, cost increase is suppressed and furthermore discharging of particles into a conveying chamber is suppressed. The EFEM has a conveying chamber and a regression channel, thereby forming a nitrogen supplying cycle. The conveying chamber is used for making the particle-eliminated FFU-purified nitrogen flow in a preset direction. The regression channel makes the nitrogen return from the downstream side of the conveying chamber to an FFU. The EFEM is provided with a conveying robot which is configured in a conveying chamber and performs a preset action in a state that a wafer is kept. The conveying robot is provided with components of a housing component which is provided with an opening; an arm mechanism which is configured outside the housing component and is used for keeping the wafer; a supporting column which supports the arm mechanisms and penetrates through the opening; and a driving mechanism which is accommodated in the housing component and is used for driving the supporting column, wherein the conveying robot has a connecting channel for connecting the housing component with the regression channel.

Description

technical field [0001] The invention relates to an EFEM (Equipment Front End Module, Equipment Front End Module) capable of circulating inert gas. Background technique [0002] Patent Document 1 discloses an EFEM that combines a processing device that performs predetermined processing on semiconductor substrates (wafers) and a FOUP (Front-Opening Unified Pod) that accommodates wafers. Handover of wafers between them. The EFEM includes a housing, a loading port, and a transport device. The housing is formed with a transport chamber for transporting wafers. There are multiple loading ports arranged on the outside of the housing, and are used to place FOUPs separately. The transport device is used to transport wafers. The wafers are transported by walking on the extended track in the room. [0003] In the past, oxygen, moisture, etc. in the transfer chamber had little influence on semiconductor circuits manufactured on wafers, but in recent years, the above influence has beco...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677
CPCH01L21/67775H01L21/67742H01L21/67766H01L21/67017H01L21/67242H01L21/67389H01L21/67772H01L21/02
Inventor 河合俊宏小仓源五郎
Owner SHINKO ELECTRIC CO LTD
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