Photosensitive resin composition, photosensitive resin laminate, and pattern forming process
一种感光树脂、组合物的技术，应用在感光材料加工、用于光机械设备的光敏材料、光学等方向，能够解决树脂膜耐溶剂性差等问题
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[0296]Examples of the present invention are given below by way of illustration and not limitation. In the examples, the weight average molecular weight (Mw) is measured by GPC against polystyrene standards using tetrahydrofuran (THF) solvent.
[0297] The anhydride-modified silicones (S-1), (S-2) and (S-3) used in the examples were identified as follows.
[0298]
[0299] [1] Synthesis of polyimide silicone
Synthetic example 1
[0301] A flask equipped with a stirrer, a thermometer and a nitrogen purge line was charged with 62.0 g (0.2 mol) of 4,4'-oxydiphthalic dianhydride, 302.3 g (0.3 mol) of anhydride-modified silicone ( S-1) and 800 g of N-methyl-2-pyrrolidone. 183.1 g (0.5 mol) of 2,2-bis(4-amino-3-hydroxyphenyl)hexafluoropropane were added to the flask in a controlled manner such that the temperature of the reaction solution could not exceed 50°C. Stirring was continued for 10 hours at room temperature. After attaching a reflux condenser with a water trap to the flask, 120 g of xylene was added to the flask, which was heated at 170° C. and held at that temperature for 6 hours, at which point the solution turned brown. The brown solution was cooled to room temperature (25° C.), which was a solution of polyimide silicone with phenolic hydroxyl groups.
[0302] 25.0 g of glycidol was added to the polyimide silicone solution, which was heated at 120° C. for 3 hours. At the end of the reaction, t...
Synthetic example 2
[0305] Charge 111.1 g (0.25 mol) of 4,4'-hexafluoropropylidene diphthalic dianhydride, 264.0 g (0.25 mol) of acid anhydride modified Silicone (S-2) and 800g of γ-butyrolactone. 183.1 g (0.5 mol) of 2,2-bis(4-amino-3-hydroxyphenyl)hexafluoropropane were added to the flask in a controlled manner such that the temperature of the reaction solution could not exceed 50°C. Stirring was continued for 10 hours at room temperature. After attaching a reflux condenser with a water trap to the flask, 120 g of xylene was added to the flask, which was heated at 170° C. and held at that temperature for 6 hours, at which point the solution turned brown. The brown solution was cooled to room temperature (25° C.), which was a solution of polyimide silicone with phenolic hydroxyl groups.
[0306] 26.2 g of glycidol was added to the polyimide silicone solution, which was heated at 120° C. for 3 hours. At the end of the reaction, the reaction solution was cooled to room temperature and poured in...
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