A macro-micro composite platform driven by servo motor and piezoelectric ceramics
A piezoelectric ceramic drive and servo motor technology, which is applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve the problem of unused macro-micro composite, reaching tens of microns, etc.
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[0023] Such as figure 1 and Figure 4 As shown in , an embodiment of the present invention provides a macro-micro composite platform driven by a servo motor 3 and piezoelectric ceramics, which includes a micro-platform 1 , a base 2 and three servo motors 3 . Described micro-platform 1 comprises upper plate 11, three piezoelectric actuators 12 and lower plate 13, and described piezoelectric actuator 12 is piezoelectric ceramic actuator, and the bottom end of described piezoelectric actuator 12 passes through Threaded fasteners are fixed on the lower plate 13, and the connection positions between the piezoelectric actuator 12 and the lower plate 13 are distributed in a triangle, and the telescopic head at the top of the piezoelectric actuator 12 is connected to the The bottom surface of the upper block 11 is connected, and the connection positions of the piezoelectric actuator 12 and the upper block 11 are distributed in a triangle. The piezoelectric actuator 12 controls the i...
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