Cycloolefin copolymer microlens array with metal diaphragm and preparation method thereof

A cyclic olefin copolymer and microlens array technology, which is applied in the directions of lenses, optomechanical equipment, and the photoengraving process of the pattern surface, can solve the problem that the dimensional accuracy and shape of optical microlenses are not easy to guarantee, and the processing and integration of supporting apertures are complicated. , long production cycle and other problems, to achieve the effect of good array uniformity and repeatability, cost and time saving, and short processing time
CN110426761BActive Publication Date: 2021-02-12CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
Publication Date
2021-02-12

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Abstract

The invention discloses a cycloolefin copolymer microlens array with a metal diaphragm and a preparation method thereof. The preparation method disclosed in the present invention includes the steps: S101, using the first photolithography mask to form a first photoresist mask on the surface of the silicon wafer substrate by photolithography; S102, etching silicon wafer micropores on the silicon wafer substrate Array; S103. After paving the cycloolefin copolymer layer on the microwell array of the silicon wafer, heat and press to obtain the first cycloolefin copolymer array; S104. Using the reverse photolithography method to utilize the second photolithography mask Forming a second photoresist mask on the cycloolefin copolymer array to obtain a second cycloolefin copolymer array; S105, evaporating a layer of metal on the structural surface of the second cycloolefin copolymer array to obtain the second cycloolefin copolymer array Tricyclic olefin copolymer array; S106. Put the third cycloolefin copolymer array into acetone solution to obtain a cycloolefin copolymer microlens array with a metal diaphragm.
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Description

technical field

[0001] The invention relates to the technical field of micromachining, in particular to a cycloolefin copolymer microlens array with a metal diaphragm and a preparation method thereof. Background technique

[0002] The microlens array is an array composed of lenses with a clear aperture and a sagittal depth of microns. It has basic imaging functions such as traditional lens focusing and imaging, and can also be used for modulation functions such as wavefront sensing and beam shaping. It is widely used in optical communications. and optoelectronics. According to the substrate, the microlens array is mainly divided into quartz glass material and polymer material. Microlens arrays made of glass are expensive, complex in processing technology, and difficult to integrate with the system. COC (Cyclic Olefin Copolymer) produced by TOPAS, as an improved material of traditional materials, has optical properties comparable to PMMA (polymethyl methacrylate, acrylic re...

Claims

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