A kind of preparation method of electric heating type getter element

Abstract

The invention discloses a preparation method for a novel electrical heating type air absorption element. The preparation method comprises the following steps that (1), an air absorption alloy material is prepared, specifically, a crushed air absorption alloy is sieved through a vibrating sieving machine, air absorption alloy powder with the specific grain size range between upper and lower screens is obtained, the air absorption alloy powder with the grain size range is immersed in anhydrous ethanol to be subjected to ultrasonic treatment, and the treated air absorption alloy powder is dried for standby application; (2), a metal alloy pipe is prepared, specifically, micropores formed in a dot matrix net type structure are drilled in the pipe wall of the metal alloy pipe, and the drilled metal alloy pipe is cleaned through ultrasonic waves and dried in the air for standby application; and (3), the air absorption element is prepared, specifically, the metal alloy pipe is filled with the treated air absorption alloy powder, and the air absorption element is prepared. According to the preparation method, the technology process is simple and easy to control, the defects of powder falling, inconvenient assembly, wire breaking and the like of an existing air absorption element are overcome, and the air absorption element prepared through the method has higher mechanical strength and machining precision.

Description

technical field

[0001] The invention relates to a preparation method of a novel electric heating suction element, belonging to the technical field of electric vacuum suction elements. Background technique

[0002] The getter material can absorb the residual active gas in the vacuum device or the active gas released during the use of the device through physical or chemical adsorption, improve the ultimate vacuum level of the vacuum system, and avoid the reaction of gas and precision components to cause pollution or excessive gas damping, etc. Negative effects, to achieve the purpose of maintaining the vacuum quality and ideal working environment of vacuum equipment or sealed devices.

[0003] In the process of use, the getter element is generally required to have excellent air-breathing performance and strength performance, and at the same time, the installation process is simple. Meeting these requirements is not only related to the characteristics of the getter material its...

Examples

Embodiment 1

[0024] The crushed ferro-zirconium-vanadium getter alloy is sieved by a vibrating sieve machine to obtain powder with a particle size range of 53-89 μm, and a special sieve with an aperture of 0.053 mm is placed on the beaker, which is integrated with the beaker, and the powder is spread flat On the sieve, inject absolute ethanol into the beaker to submerge the aspirated alloy powder, place the beaker in an ultrasonic container for ultrasonic treatment, and stop for 2 minutes every 3 minutes, repeat 3 times, then replace with new absolute ethanol and repeat The above steps were performed three times, and the processed powder was dried in a vacuum oven at 80° C. for 3 hours after the absolute ethanol volatilized. Then cut the nickel-chromium alloy tube with a circular cross-section, a diameter of 1 mm, and a wall thickness of 10 μm into a short tube with a length of 10 mm, and drill a row of micro-holes with a diameter of 30 μm along the axial direction of the tube wall by laser...

Embodiment 2

[0026] The crushed zirconium-vanadium-manganese getter alloy is sieved by a vibrating sieve machine to obtain a powder with a particle size range of 104-150 μm, and a special sieve with an aperture of 0.104 mm is placed on the beaker, and the beaker is integrated, and the powder is spread flat On the sieve, inject absolute ethanol into the beaker to submerge the aspirated alloy powder, place the beaker in an ultrasonic container for ultrasonic treatment, and stop for 2 minutes every 3 minutes, repeat 3 times, then replace with new absolute ethanol and repeat The above steps were performed three times, and the processed powder was dried in a vacuum oven at 80° C. for 3 hours after the absolute ethanol volatilized. Then the nickel-chromium alloy tube with an oval section, a diameter of 5 mm, and a wall thickness of 40 μm is cut into a short tube with a length of 12 mm, and a row of micro-holes with a diameter of 80 μm are drilled along the axial direction of the tube wall by mech...

Embodiment 3

[0028]The crushed zirconium-aluminum getter alloy is sieved by a vibrating sieve machine to obtain powder with a particle size range of 74-120 μm, and a special sieve with an aperture of 0.074 mm is mounted on the beaker, and the beaker is integrated, and the powder is spread on the On the sieve, inject absolute ethanol into the beaker to submerge the aspirated alloy powder, place the beaker in an ultrasonic container for ultrasonic treatment, and stop for 2 minutes every 3 minutes, repeat 3 times, then replace with new absolute ethanol and repeat the above Step 3 times, the processed powder is dried in a vacuum oven at 80° C. for 3 hours after the absolute ethanol volatilizes. Then cut the iron-chromium-aluminum alloy tube with a circular cross-section, a diameter of 8mm, and a wall thickness of 60μm into a short tube with a length of 7mm, and use laser drilling to drill a row of micro-holes with a diameter of 50μm along the axial direction of the tube wall , and then rotate ...

technical field

[0001] The invention relates to a preparation method of a novel electric heating suction element, belonging to the technical field of electric vacuum suction elements. Background technique

[0002] The getter material can absorb the residual active gas in the vacuum device or the active gas released during the use of the device through physical or chemical adsorption, improve the ultimate vacuum level of the vacuum system, and avoid the reaction of gas and precision components to cause pollution or excessive gas damping, etc. Negative effects, to achieve the purpose of maintaining the vacuum quality and ideal working environment of vacuum equipment or sealed devices.

[0003] In the process of use, the getter element is generally required to have excellent air-breathing performance and strength performance, and at the same time, the installation process is simple. Meeting these requirements is not only related to the characteristics of the getter material its...

Examples

Embodiment 1

[0024] The crushed ferro-zirconium-vanadium getter alloy is sieved by a vibrating sieve machine to obtain powder with a particle size range of 53-89 μm, and a special sieve with an aperture of 0.053 mm is placed on the beaker, which is integrated with the beaker, and the powder is spread flat On the sieve, inject absolute ethanol into the beaker to submerge the aspirated alloy powder, place the beaker in an ultrasonic container for ultrasonic treatment, and stop for 2 minutes every 3 minutes, repeat 3 times, then replace with new absolute ethanol and repeat The above steps were performed three times, and the processed powder was dried in a vacuum oven at 80° C. for 3 hours after the absolute ethanol volatilized. Then cut the nickel-chromium alloy tube with a circular cross-section, a diameter of 1 mm, and a wall thickness of 10 μm into a short tube with a length of 10 mm, and drill a row of micro-holes with a diameter of 30 μm along the axial direction of the tube wall by laser...

Embodiment 2

[0026] The crushed zirconium-vanadium-manganese getter alloy is sieved by a vibrating sieve machine to obtain a powder with a particle size range of 104-150 μm, and a special sieve with an aperture of 0.104 mm is placed on the beaker, and the beaker is integrated, and the powder is spread flat On the sieve, inject absolute ethanol into the beaker to submerge the aspirated alloy powder, place the beaker in an ultrasonic container for ultrasonic treatment, and stop for 2 minutes every 3 minutes, repeat 3 times, then replace with new absolute ethanol and repeat The above steps were performed three times, and the processed powder was dried in a vacuum oven at 80° C. for 3 hours after the absolute ethanol volatilized. Then the nickel-chromium alloy tube with an oval section, a diameter of 5 mm, and a wall thickness of 40 μm is cut into a short tube with a length of 12 mm, and a row of micro-holes with a diameter of 80 μm are drilled along the axial direction of the tube wall by mech...

Embodiment 3

[0028]The crushed zirconium-aluminum getter alloy is sieved by a vibrating sieve machine to obtain powder with a particle size range of 74-120 μm, and a special sieve with an aperture of 0.074 mm is mounted on the beaker, and the beaker is integrated, and the powder is spread on the On the sieve, inject absolute ethanol into the beaker to submerge the aspirated alloy powder, place the beaker in an ultrasonic container for ultrasonic treatment, and stop for 2 minutes every 3 minutes, repeat 3 times, then replace with new absolute ethanol and repeat the above Step 3 times, the processed powder is dried in a vacuum oven at 80° C. for 3 hours after the absolute ethanol volatilizes. Then cut the iron-chromium-aluminum alloy tube with a circular cross-section, a diameter of 8mm, and a wall thickness of 60μm into a short tube with a length of 7mm, and use laser drilling to drill a row of micro-holes with a diameter of 50μm along the axial direction of the tube wall , and then rotate ...