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Transfer jig and cutting blade changing method

A cutting tool and jig technology, which is applied in the field of replacement of conveying jigs and cutting tools, can solve the problem of increasing the man-hours required by the cutting tools, and achieve the effect of reducing the man-hours

Active Publication Date: 2019-12-20
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, in this cutting device, there is a tendency for the man-hours required for the replacement of the cutting tool to increase.

Method used

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  • Transfer jig and cutting blade changing method
  • Transfer jig and cutting blade changing method
  • Transfer jig and cutting blade changing method

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0048] The method of replacing the transfer jig and the cutting tool according to the first embodiment of the present invention will be described with reference to the drawings. figure 1 It is a perspective view showing a configuration example of a cutting device for implementing the cutting tool replacement method of the first embodiment. figure 2 is shown as figure 1 A perspective view of a workpiece to be processed by the cutting device shown. image 3 is showing figure 1 A perspective view of the main part of the chuck table of the cutting device shown. Figure 4 will be figure 1 An exploded perspective view of the cutting unit of the shown cutting device. Figure 5 is showing figure 1 A perspective view of a cassette set on the cassette elevator of the cutting device shown. Image 6 is showing figure 1 A perspective view of the temporary storage unit of the transport unit of the cutting device shown. Figure 7 is showing figure 1 Perspective view of the transpor...

no. 2 Embodiment approach

[0139] A cutting tool replacement method and a transfer jig according to a second embodiment of the present invention will be described with reference to the drawings. Figure 28 It is a perspective view of main parts showing a configuration example of a cutting device for carrying out the cutting tool replacement method of the second embodiment. Figure 29 It is a perspective view which shows the structural example of the transfer jig of 2nd Embodiment. Figure 28 with Figure 29 In , the same reference numerals are assigned to the same parts as those in the first embodiment, and description thereof will be omitted.

[0140] The processing unit 2-2 of the cutting device 1-2 for carrying out the cutting tool replacement method of the second embodiment has a sub-chuck table 111, and the transfer jig 100-2 is used to transfer the dressing plate 110 as a consumable to the The sub-chuck table 111 of the machining unit 2 has the same configuration as that of the first embodiment ...

Deformed example 1

[0148] The cutting tool replacement method and the transfer jig according to Modification 1 of the first embodiment and the second embodiment of the present invention will be described with reference to the drawings. Figure 30 It is a plan view showing a structural example of a manufacturing facility provided with a cutting device for implementing the cutting tool replacement method of Modification 1 of the first embodiment and the second embodiment. Figure 30 In the description, the same parts as those of the first embodiment and the second embodiment are given the same reference numerals, and description thereof will be omitted.

[0149] In the cutting tool replacement method of Modification 1 of the first embodiment and the second embodiment, by using a Figure 30 The illustrated manufacturing facility 300 has the same structure as the first and second embodiments except that the tray 302 on which the conveyor belt 301 circulates holds the transfer jigs 100 , 100 - 2 and ...

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PUM

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Abstract

The invention provides a transfer jig and a cutting blade changing method via which time needed for replacing the cutting tool can be reduced. The transfer jig for use in transferring a new cutting blade as a replacement component to the processing unit, in a cutting apparatus including a chuck table holding a workpiece, a processing unit having a spindle and a cutting blade detachably mounted onthe spindle, a cutting blade changing unit changing the cutting blade, and a transfer mechanism supplying the workpiece to the processing unit. The transfer jig is adapted to be transferred by the transfer mechanism transferring the workpiece. The transfer jig is provided with a carrying part carrying the cutting blade for replacement.

Description

technical field [0001] The present invention relates to a method for replacing a transfer jig and a cutting tool. Background technique [0002] When cutting a workpiece such as a semiconductor wafer, a cutting device having a cutting blade is used as a processing device (for example, refer to Patent Document 1). In order to operate the above-mentioned cutting device continuously, it is necessary to automatically supply cutting tools as consumables. [0003] Therefore, the cutting device disclosed in Patent Document 1 includes: a tool holder that holds a plurality of cutting tools; and a tool detachment mechanism that replaces the cutting tools of the cutting unit with cutting tools on the tool holder. [0004] Patent Document 1: Japanese Patent Laid-Open No. 2007-208114 [0005] In the cutting device disclosed in Patent Document 1, the operator replaces the used cutting tool held by the tool holder with an unused cutting tool. Therefore, in this cutting device, the man-ho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B27/06B24B41/00B24B41/06B24B45/00B24B49/00B24B49/12B24B51/00B24B55/06
CPCB24B27/06B24B45/003B24B45/006B24B51/00B24B49/12B24B49/00B24B55/06B24B41/005B24B41/06B24B41/00B28D5/0082B28D5/022B23Q3/15722B23Q3/15746B23Q3/15503B28D5/029Y10T483/10Y10T483/16Y10T483/1736B23Q2003/155407B23Q3/15773
Inventor 寺田一贵
Owner DISCO CORP