Grating Talbot image-based object surface curvature detection system and method

Abstract

The invention discloses a grating Talbot image-based object surface curvature detection system and method. The method employs collimating light to perpendicularly irradiate a Lang grating, a transmitting light ray passes through a beam split mirror and then shows a clear grating Talbot image on a surface of a detected object, reflection light can show the grating Talbot image containing surface curvature information of the detected object at a special position, so that a ccd is used for acquiring the Talbot image, and the surface curvature of the detected object is calculated according to theacquired Talbot image. The device has the advantages of simplicity, low cost, high interference-resistant capability, wide application range and the like.

Description

technical field [0001] The invention belongs to the field of optical precision testing, in particular to a system and method for detecting curvature of an object surface based on a grating Taber image. Background technique [0002] Spherical mirrors are increasingly used in modern optical systems, and the radius of curvature of the mirror is one of the important parameters that determine its optical characteristics. By measuring the radius of curvature of the optical component, the processing quality of the measured optical component can be determined for further correction , so as to achieve higher precision. Therefore, the precise measurement technology of the radius of curvature has important research significance and application value. [0003] The methods of measuring the radius of curvature of the mirror surface can be classified into two categories: contact and non-contact. Contact measurement mainly includes spherical model method, Newton ring method, spherometer m...

AI Technical Summary

Problems solved by technology

However, contact detection technology requires point-by-point detection, and the measurement speed is slow; affected by the diameter of the measurement probe, the sampling density is limited, it is difficult to obtain high-frequency errors of the measured surface shape, and it is easy to scratch the surface of the measured mirror; the equipment is expensive , higher maintenance cost

Although non-contact measurement does not damage the surface of the measured object, it generally has high requirements for the measurement environment, and a slight vibration will cause a large error; and the operation of high-precision measuring equipment is complicated and the cost is high

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