Manufacturing method of patterned substrate, patterned substrate and light emitting diode

Abstract

The invention discloses a manufacturing method of a patterned substrate, the patterned substrate and a light emitting diode. The method comprises an initial stage, namely, forming a patterned mask with an initial morphology on a substrate; a morphology forming stage, namely, introducing a first etching gas, and forming a patterned mask with a predetermined morphology and a preliminary patterned substrate under preset first etching process parameters; a corner forming inhibition stage, namely, introducing a second etching gas, and inhibiting the formation of corners of the patterned mask with the predetermined morphology under preset second etching process parameters to obtain an intermediate patterned substrate; and a morphology modification stage, namely, introducing a third etching gas,and modifying the morphology of the side wall of the intermediate patterned substrate under preset third etching process parameters to obtain the final patterned substrate. According to the manufacturing method of the patterned substrate, the process time can be effectively shortened, and the productivity is improved.

Description

Technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a manufacturing method of a patterned substrate, a patterned substrate and a light emitting diode. Background technique [0002] PSS (Patterned Sapphire Substrates), or patterned substrate technology, is a commonly used method to improve the light efficiency of GaN-based LED devices. This method can effectively reduce the dislocation density of the GaN epitaxial material, thereby reducing the non-radiative recombination of the active area, reducing the reverse leakage current, and improving the life of the LED. The light emitted from the active area is scattered through the interface of the GaN and sapphire substrate multiple times, changing the exit angle of the total reflection light, increasing the probability of the LED light emitting from the front (front mounted) and back (flip mounted), thereby increasing Light extraction efficiency. At the same time, the ...

AI Technical Summary

Problems solved by technology

[0004] Obviously, the PSS patterned substrate manufacturing method in the related art takes too long to modify the shape, resulting in a long process time for the patterned substrate and low production capacity, which cannot meet the production needs

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