Thin Film Resistors for Probe Cards

Abstract

The present invention relates to a thin film resistor for a probe card, and more particularly relates to a thin film resistor for a probe card that prevents cracks from being generated when the thin film resistor expands and contracts due to repeated heat. To this end, the thin film resistor of the present invention is connected to and provides resistance to a wiring ribbon cable formed in a space transformer that transfers signals between probe pins and a printed circuit board, and interfaces the signals, so The thin film resistor includes: a pair of electrode pads connected to the wiring ribbon cable; a resistance wire connected to the pair of electrode pads to provide resistance to the signal path; an elastic part formed by detouring the resistance wire; The void part is formed by being surrounded by the elastic part; and the elastic restricting part traverses the elastic void part and connects with the elastic part at one end and the other end, so as to limit the expansion and contraction of the elastic part.

Description

technical field [0001] The present invention relates to a thin film resistor for a probe card, and more particularly relates to a thin film resistor for a probe card that prevents cracks from being generated when the thin film resistor expands and contracts due to repeated heat. [0002] Here, a thin-film resistor refers to a resistor manufactured as a thin film by a method such as vapor-depositing a metal on a substrate. Background technique [0003] In general, probe cards are used to inspect wafers for abnormalities at the wafer stage, which is a stage before packages of semiconductors are manufactured. [0004] This probe card includes: a probe pin that contacts a wafer and receives a signal transmission; a PCB (Printed Circuit Board, printed circuit board) that receives a signal transmission from the probe pin and transmits a signal to a tester (tester); and A space transformer that transfers numbers between the probe pins and the PCB. [0005] This space transformer ...

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Problems solved by technology

[0008] However, thin film resistors have a problem that the space transformer repeats expansion and contraction caused by heat while undergoing a thermal test when wafer inspection is performed, such as Figure 1a and Figure 1b As shown, a crack occurs in the resistance wire 200

[0009] With regard to this problem, recently, with the trend of increasing the number of probe pins for large-area wafer inspection, the number of thin film resistors is also increasing, and space transformers are constructed in place of multiple ceramic layers to form a multilayer ceramic-based substrate. A polyimide layer, in this trend, there is a problem that the thin-film resistor provided on the polyimide layer with a higher coefficient of thermal expansion than ceramics repeats expansion and contraction to a greater extent and the frequency of cracks increases.

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