A Piezoelectric Vibration Structure of an Inkjet Printing Head
An inkjet print head, piezoelectric vibration technology, applied in printing and other directions, can solve the problem of few reports on the impact of piezoelectric vibration plate vibration amplitude, achieve high vibration amplitude and frequency, low production cost, long service life Effect
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[0021] like Figure 1-3 As shown, the piezoelectric vibration structure of the present invention is installed on the piezoelectric inkjet printing head, which is composed of multi-layer materials, including from top to bottom: a vibration thin plate, a top electrode 3, a piezoelectric ceramic 4, and a hinged micro-region 7 , bottom electrode 5 and substrate 6; the vibrating thin plate is composed of material a1 and material b2. The material a1 is a polymer material PC with a thickness of 1um; the material b2 is Ni with a thickness of 1um; the material used for the top electrode 3 is Pt with a thickness of 200nm; the material used for the piezoelectric ceramic 4 is Lead zirconate titanate piezoelectric ceramics (PZT) with a thickness of 1um; the material used for the bottom electrode 5 is Pt with a thickness of 200nm; the material used for the substrate 6 is SiO 2 , with a thickness of 1um; the hinged micro-region 7 is made of polymer PN with a thickness of 1um and a width of ...
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