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A Piezoelectric Vibration Structure of an Inkjet Printing Head

An inkjet print head, piezoelectric vibration technology, applied in printing and other directions, can solve the problem of few reports on the impact of piezoelectric vibration plate vibration amplitude, achieve high vibration amplitude and frequency, low production cost, long service life Effect

Active Publication Date: 2020-12-15
大连瑞林数字印刷技术有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are few reports on the impact of different structural forms of the piezoelectric layer, such as constraints between completely free and completely fixed boundary conditions, on the vibration amplitude of the piezoelectric vibrating plate

Method used

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  • A Piezoelectric Vibration Structure of an Inkjet Printing Head
  • A Piezoelectric Vibration Structure of an Inkjet Printing Head
  • A Piezoelectric Vibration Structure of an Inkjet Printing Head

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Experimental program
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Embodiment Construction

[0021] like Figure 1-3 As shown, the piezoelectric vibration structure of the present invention is installed on the piezoelectric inkjet printing head, which is composed of multi-layer materials, including from top to bottom: a vibration thin plate, a top electrode 3, a piezoelectric ceramic 4, and a hinged micro-region 7 , bottom electrode 5 and substrate 6; the vibrating thin plate is composed of material a1 and material b2. The material a1 is a polymer material PC with a thickness of 1um; the material b2 is Ni with a thickness of 1um; the material used for the top electrode 3 is Pt with a thickness of 200nm; the material used for the piezoelectric ceramic 4 is Lead zirconate titanate piezoelectric ceramics (PZT) with a thickness of 1um; the material used for the bottom electrode 5 is Pt with a thickness of 200nm; the material used for the substrate 6 is SiO 2 , with a thickness of 1um; the hinged micro-region 7 is made of polymer PN with a thickness of 1um and a width of ...

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Abstract

The invention discloses a piezoelectric vibration structure of an ink-jet printing head. The piezoelectric vibration structure comprises a vibration thin plate and a piezoelectric element, the vibration thin plate is composed of a material a and a material b, the piezoelectric element is composed of a top electrode, piezoelectric ceramics, a bottom electrode, a base plate and hinge support micro-areas, when the top electrode and the bottom electrode are electrified at the same time, the piezoelectric ceramics deforms, then the vibration thin plate deforms, ink is squeezed, and then the ink issprayed out. Compared with the prior art, the piezoelectric vibration structure has the following advantages that 1, a driving structure of the piezoelectric ink-jet printing head is simple in preparation process, and the repeatability is good; 2, the piezoelectric vibration structure has high vibration amplitude and frequency and long service life; and 3, the piezoelectric vibration structure canbe made of multi-layer materials such as metal, silicide, polymers, inorganic matter, organic matter or semiconductors, and the preparation cost is low.

Description

technical field [0001] The invention belongs to the technical field of manufacturing semiconductor sensors and actuators, and relates to a piezoelectric vibration structure of an inkjet printing head, which is designed and manufactured by adopting micro-electromechanical technology (MEMS). Background technique [0002] Piezo inkjet printing is a digital drop-on-demand inkjet printing technology. The piezoelectric inkjet print head manufactured based on microelectromechanical system (MEMS) technology can deposit various ink materials on different substrates in various working modes, and has a long service life and high printing accuracy. With the continuous innovation of inkjet print head technology, inkjet printing has gradually expanded from the traditional image printing field to various fields of modern society, such as flexible integrated circuits, biological cell printing, emerging 3D printing technology, etc. The piezoelectric drive element is the core device of the p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B41J2/14
CPCB41J2/14201
Inventor 韩梅王力成
Owner 大连瑞林数字印刷技术有限公司