Ultrahigh-precision plane air floatation work piece table
A workpiece table and air flotation technology, which is applied in the manufacture of electrical components, conveyor objects, semiconductor/solid-state devices, etc., can solve problems such as large errors, low positioning accuracy, and jamming, so as to eliminate friction, improve efficiency, and ensure The effect of stability
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[0030] Such as figure 1 , figure 2 As shown, an ultra-high-precision planar air-floating workpiece table includes a platform 1, and the platform 1 adopts a marble platform, which is polished by hand to improve precision. Two guide rails 2 are arranged on the upper side of the platform 1, and the two guide rails 2 are respectively located on the left and right sides of the platform 1, and are arranged parallel to each other. A vertical motor 3 is fixed on the outside of each guide rail 2, and the vertical motor 3 adopts a direct drive motor. Each guide rail 2 is slidably provided with a vertical air bearing slider 5 , and the vertical air bearing slider 5 is connected to the vertical motor 3 . Further, the vertical motor 3 includes a first stator 301 and a first mover 302 that cooperate with each other. The first stator 301 is fixed on the surface of the platform 1 and is parallel to the guide rail 2. The upper end of the first mover 302 is fixed with a motor The mounting pl...
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