Micro-displacement platform driven by piezoelectric ceramics

Abstract

The invention relates to a micro-displacement output platform with a two-stage amplifying mechanism. The platform is mainly composed of a driving part, an amplifying part, a motion executing part anda measuring part. The driving part mainly realizes the function by piezoelectric ceramics, and pretightening of the piezoelectric ceramics is realized by disc springs; the amplifying part is formed bycombining a traditional hinge and a flexible hinge; and the measuring part consists of an ultrasonic-based measuring device. According to the micro-displacement mechanism, the output displacement precision is high, the dynamic response is fast, the characteristic of the disc spring enables the pretightening force to be kept constant in the piezoelectric ceramic output displacement process, and the symmetrical distribution of the hinges can effectively eliminate parasitic displacement. The micro-displacement mechanism overcomes the defect that small-displacement output can be realized only byusing piezoelectric ceramics, stepless amplification of the output displacement of the piezoelectric ceramics can be realized by adjusting the mechanism according to actual requirements, and multi-scale output precision from nanometer level to millimeter level is realized. The micro-displacement output platform can be applied to correcting the precision of measuring of the fixed film thickness byan ultrasonic probe.

Description

Technical field: [0001] The invention belongs to the field of mechanical precision displacement drive, in particular to a micro-displacement platform driven by piezoelectric ceramics. Background technique: [0002] Since mechanical parts such as gears and bearings rely on lubricants (oil, water, etc.) to reduce friction and wear during use, the thickness of the oil film or water film has a crucial impact on the performance and service time of mechanical parts. If the film thickness is too thin, the surface of the parts will be in direct contact. After a period of time, the friction and temperature between the parts will increase sharply, causing wear and tear, and even lead to serious mechanical accidents. However, if the film thickness is too thick, it will reduce the performance of the equipment. The carrying capacity makes it unable to work stably, resulting in excessive energy loss and oil (water) leakage. Therefore, monitoring and calibrating the thickness of oil film ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the above-mentioned defects in the prior art, and it is necessary to design a new type of micro-displacement platform to overcome the problems of single amplification ratio, poor replaceability, and low output rigidity of the traditional piezoelectric ceramic amplification mechanism.

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