Electrostatic adsorption device and preparation method thereof
An electrostatic adsorption and conductive layer technology, which is applied in lamination devices, workpiece clamping devices, chemical instruments and methods, etc., can solve the problems of poor electrode structure insulation, poor adsorption force, and difficult control of electrode processing precision, etc., to improve electrostatic Adsorption force, dense electrode pattern, and the effect of reducing the difficulty of preparation
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[0037]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0038] figure 1 It is a schematic structural diagram of an electrostatic adsorption device provided by an embodiment of the present invention. like figure 1 As shown, the electrostatic adsorption device includes: an insulating layer 1, a conductive layer 2 arranged on the surface of the insulating layer 1, and a continuous insulating line region 3 arranged on the surface of the insulating layer 1, wherein the insulating line region 3 runs through the ...
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