Coaxial integrated macro-micro composite driver and control method thereof

Abstract

The invention discloses a coaxial integrated macro-micro composite driver and a control method thereof. The coaxial integrated macro-micro composite driver has millimeter-scale macro-motion and micron-scale micro-motion functions. Under a macro-motion working condition, the macro-motion coil of the driver is conducted and interacts with the fixed permanent magnet through a magnetic field to driveall internal parts except the fixed part to roll in the axis direction to generate macro-motion displacement. Under a micro-motion working condition, the micro-motion coil of the driver is conducted to generate a magnetic field, so that the thin rod which is arranged on the central axis and is made of the giant magnetostrictive material deforms at the non-fixed front end under the action of the magnetic field, and the micro-motion rod is pushed to generate micro-motion displacement in the axial direction. And the mutual influence when the two coils are conducted is isolated by a magnetic isolation cylinder arranged between the two coils. And meanwhile, the used control method is specifically explained. The coaxial integrated macro-micro composite driver has the advantages that characteristics of large stroke, high precision, heavy load, quick response, no connection error and the like in the driving process of precise positioning can be met, and meanwhile, the coaxial integrated macro-micro composite driver is simple in overall structure and convenient to manufacture.

Description

technical field [0001] The invention relates to a driving device in the technical field of precision positioning, more precisely, a coaxial integrated macro-micro composite driver and a control method thereof. Background technique [0002] With the rapid development of high-end equipment manufacturing industry, the demand for precision positioning workbench with large stroke, high precision, heavy load and fast response is increasing day by day. The main means of the contradiction between the two is more and more used in engineering applications. At present, the macro-micro composite driving method usually adopts the installation method of series superposition, and arranges the macro-micro two-stage motion structure, that is, the micro-motion mechanism is directly placed on the macro-motion mechanism, which not only leads to the overall structure of the workbench. It also leads to a connection error between the macro and micro two-stage drivers. Piezoelectric ceramic actua...

AI Technical Summary

Problems solved by technology

[0003] The present invention mainly solves the existing problems of the existing driver, thereby providing a driver with the characteristics of large stroke, high precision, heavy load, fast response, and no connection error in the driving process of precise positioning, and at the same time, the overall structure is simple and the manufacture is convenient. , and a coaxial integrated macro-micro composite driver with high control precision and its control method

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