Large-curvature complex mirror surface high-precision measurement method adopting compensating mirror
A measurement method and compensation mirror technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficult to achieve absolute measurement, reduce the longitudinal range and normal swing range, improve measurement capabilities, and improve measurement accuracy Effect
Inactive Publication Date: 2020-04-10
FUDAN UNIV
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Therefore, deflection measurements are difficult to achieve absolute measurements for highly curved mirrors
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Embodiment 1
[0021] Example 1: The diameter of the measured concave spherical surface is 1m, and the best fitting concave spherical surface has a radius of curvature of 1.33m. The convex spherical compensating mirror used has a radius of curvature of 145mm and a diameter of 250mm. The origin of the coordinate system is set at the center of the measured concave surface, and the position of each component is obtained according to the aforementioned optical path design method as Figure 4 Shown, the unit is mm.
[0022] Project sinusoidal stripes on the screen, such as Figure 5 Shown in (a), the distorted fringes photographed with the traditional method and the method proposed by the present invention, such as Figure 5 (b) and 5(c). Obviously, due to the converging effect of the light on the measured concave surface, the image formed on the screen is very small, accounting for only a small part of the camera target surface, so the sampling rate is low. However, the method proposed by the...
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The invention belongs to the technical field of optical mirror surface measurement, and particularly relates to a large-curvature complex mirror surface high-precision measurement method adopting a compensating mirror. Zero deflection measurement is achieved through a compensating mirror, specifically, a reference compensating mirror with curvature opposite to that of a large-curvature complex mirror surface is added into a detection light path, and absolute height measurement of a measured surface shape is converted into relative measurement relative to a spherical surface shape deviation. The method comprises the following specific steps of: fitting a to-be-measured large-curvature mirror surface into a spherical surface, introducing a compensation reflector with a curvature symbol opposite to that of a fitting spherical surface into the light path, eliminating the focal power caused by the measured complete mirror surface, thus converting a plane reference in the traditional deflection measurement into a spherical surface reference, namely directly measuring the surface shape deviation of the complex mirror surface relative to the spherical surface, effectively reducing the longitudinal measuring range and the normal swinging range, improving the measurement precision, and enhancing the measurement capability on large-curvature convex and concave optical mirror surfaces.
Description
technical field [0001] The invention belongs to the technical field of optical mirror surface measurement, and in particular relates to a large curvature complex mirror surface measurement method. Background technique [0002] In modern precision manufacturing, complex aspheric and free-form optical components are widely used. Its surface shape quality measurement poses a huge problem to the field of precision engineering. The traditional laser interferometry technology directly measures the deviation of the surface shape relative to the plane or sphere, and it is difficult to measure the complex curved surface seriously deviated from the plane / sphere. Compensation elements such as zero interferometry or CGH can convert the reference wavefront into a complex surface close to the nominal surface shape of the measured component, so that nanometer-precision measurement of aspheric / free-form surfaces can be achieved [1]. However, this method requires the design of special comp...
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IPC IPC(8): G01B11/25
CPCG01B11/2527
Inventor 张祥朝叶俊强牛振岐朱睿徐敏
Owner FUDAN UNIV