Quartz vibrating beam accelerometer sensitive assembly

Abstract

The invention relates to the technical field of accelerometers, and discloses a quartz vibrating beam accelerometer sensitive assembly. The assembly comprises an outer frame, a flexible supporting piece, an isolation frame, an outer connecting piece, an inner connecting piece, a bracket, a detection mass block and a vibrating beam, the isolation frame is positioned in the outer frame; the outer side of one end of the isolation frame is connected with the inner side of the outer frame; the inner side of the other end of the isolation frame is connected with the bracket through inner connectors;one end of the vibration beam is connected with the detection mass block, the other end of the vibration beam is connected with the support, flexible supporting pieces are arranged between the upperend face of the support and the lower end face of the detection mass block and symmetrically distributed on the two sides of the vibration beam, the vibration beam and the flexible supporting pieces are not coplanar, and the flexible supporting pieces on the two sides are coplanar. Therefore, by additionally arranging the isolation frame and related components, a vibration beam energy dissipationchannel can be blocked, a double-interdigital structure is simplified into a single-interdigital structure, and a narrow gap is avoided. Moreover, the isolation frame can block the introduction of external thermal stress, thereby improving the temperature environment adaptability of the accelerometer.

Description

technical field [0001] The invention relates to the technical field of accelerometers, in particular to a sensitive component of a quartz vibrating beam accelerometer. Background technique [0002] The new generation of strategic weapons represented by cruise missiles, long-range bombers, submarines, intercontinental missiles, and hypersonic vehicles has an urgent need for small, high-precision accelerometers with high precision, high reliability, high stability, and low cost. Typical indicators are measurement range ±50g, bias stability 5μg, and scale factor stability 5ppm. At present, the pendulum gyro accelerometer (PIGA for short) is used, but its complex structure, large volume and weight, difficult maintenance and other characteristics are difficult to meet the development needs of future strategic weapons. The MEMS accelerometer based on the vibrating beam is the most important technical development direction of small high-precision accelerometers at present, which c...

AI Technical Summary

Problems solved by technology

[0005] 1. The coefficient of thermal expansion does not match

The quartz vibrating beam accelerometer is mainly sensitive to external stress. When the thermal expansion coefficients of the quartz vibrating beam and the metal pendulum are inconsistent, and when the ambient temperature changes, the expansion and contraction ratios of the quartz vibrating beam and the metal pendulum are inconsistent, resulting in a Generate large internal stress, which greatly affects the measurement accuracy of the accelerometer;

[0006] 2. Large cross-coupling

It is manifested that the output changes greatly before and after vibration, and due to the large cross-coupling coefficient, the vibration rectification error is relatively large during the vibration process

[0007] 3. Difficult to process

The narrow gap unique to the double interdigitated quartz beam makes it difficult to process side electrodes

[0008] 4. High cost

The metal pendulum is machined, because of its high requirements for dimensional accuracy and consistency, resulting in high processing costs

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