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Substrate evaporation bearing plate and vacuum evaporation instrument

A technology for substrates and trays, applied in the field of machinery, can solve the problems of fewer types of evaporation substrates and insufficient utilization of the space of substrate evaporation trays, etc., to improve space utilization, increase types and numbers, The effect of improving efficiency

Pending Publication Date: 2020-04-17
JITRI INST OF ORGANIC OPTOELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing substrate evaporation tray can only place two substrates, and there are few types of evaporation substrates, so the space on the substrate evaporation tray cannot be fully utilized

Method used

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  • Substrate evaporation bearing plate and vacuum evaporation instrument
  • Substrate evaporation bearing plate and vacuum evaporation instrument
  • Substrate evaporation bearing plate and vacuum evaporation instrument

Examples

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Effect test

Embodiment 1

[0041] This embodiment provides a substrate evaporation carrying plate, which is used in a vacuum evaporation apparatus. The substrate evaporation carrying plate can place multiple substrates, and there are many types of evaporation substrates, which improves the efficiency of substrate evaporation. Space utilization of plated carrier trays.

[0042] Specifically, such as figure 1 and figure 2 As shown, the substrate evaporation carrier includes a chassis and a baffle assembly 3, the chassis is provided with a plurality of bearing parts 2 for placing substrates, the baffle assembly 3 is arranged below the chassis, and the baffle assembly 3 can be opposite to the chassis. Movement, and the baffle assembly 3 is used to switch whether to evaporate and switch the desired evaporation pattern 4. During the evaporation process, the baffle assembly 3 can block the evaporation pattern 4 so that the corresponding substrate does not have the evaporation pattern, and can also switch th...

Embodiment 2

[0051] This embodiment provides a substrate evaporation carrying plate, which is used in a vacuum evaporation apparatus. The substrate evaporation carrying plate can place multiple substrates, and there are many types of evaporation substrates, which improves the efficiency of substrate evaporation. Space utilization of plated carrier trays.

[0052] Specifically, such as Figure 4 and Figure 5 As shown, the substrate evaporation carrier includes a chassis and a baffle assembly 3, the chassis is provided with a plurality of bearing parts 2 for placing substrates, the baffle assembly 3 is arranged below the chassis, and the baffle assembly 3 can be opposite to the chassis. Movement, and the baffle assembly 3 is used to switch whether to evaporate and switch the desired evaporation pattern 4. During the evaporation process, the baffle assembly 3 can block the evaporation pattern 4 so that the corresponding substrate does not have the evaporation pattern, and can also switch t...

Embodiment 3

[0059] This embodiment provides a substrate evaporation carrying plate, which is used in a vacuum evaporation apparatus. The substrate evaporation carrying plate can place multiple substrates, and there are many types of evaporation substrates, which improves the efficiency of substrate evaporation. Space utilization of plated carrier trays.

[0060] Specifically, such as Figure 7 and Figure 8 As shown, the substrate evaporation carrier includes a chassis and a baffle assembly 3, the chassis is provided with a plurality of bearing parts 2 for placing substrates, the baffle assembly 3 is arranged below the chassis, and the baffle assembly 3 can be opposite to the chassis. Movement, and the baffle assembly 3 is used to switch whether to evaporate and switch the desired evaporation pattern 4. During the evaporation process, the baffle assembly 3 can block the evaporation pattern 4 so that the corresponding substrate does not have the evaporation pattern, and can also switch t...

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Abstract

The invention relates to the technical field of machinery and discloses a substrate evaporation bearing plate and a vacuum evaporation instrument. The substrate evaporation bearing plate is applied tothe vacuum evaporation instrument and comprises a base plate and a baffle component; the base plate is provided with a plurality of bearing parts used for placing substrates; the baffle component isarranged below the base plate and can move relative to the base plate; and the baffle component is used for switching whether to implement evaporation or not and switching the pattern which is to be evaporated. The baffle component in the substrate evaporation bearing plate provided by the invention can be used for shielding the evaporation figure so that the corresponding substrate is not evaporated with a pattern and can also be used for switching the evaporation patterns according to the evaporation requirement of each substrate so that the evaporation instrument can be used for evaporatinga plurality of and various types of substrates simultaneously, thereby increasing the type and quantity of the evaporated substrates, increasing the space utilization rate of the substrate evaporation bearing plate and improving the evaporation efficiency of the evaporation instrument.

Description

technical field [0001] The invention relates to the field of mechanical technology, in particular to a substrate evaporation carrying plate and a vacuum evaporation apparatus. Background technique [0002] Vacuum thermal evaporation coating technology is widely used in the manufacture of flat-panel displays such as organic light-emitting displays, and it is also widely used in the industrialization of corresponding thin-film devices. The basic principle is to use heating to evaporate the raw material to be formed into a thin film, and change from a condensed phase to a gas phase. The molecules or atoms of the raw material gasify and escape from the surface to form a vapor flow, which is incident on the surface of the substrate (substrate), and finally The evaporated molecules or atoms are deposited on the substrate (substrate) and condense to form a solid film. [0003] In an organic light emitting display device, an organic light emitting layer emitting visible light and a...

Claims

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Application Information

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IPC IPC(8): C23C14/50C23C14/24C23C14/12C23C14/04
CPCC23C14/505C23C14/042C23C14/24C23C14/12
Inventor 冯亚青朱文俊张敬娣梁舰敬文华冯敏强廖良生
Owner JITRI INST OF ORGANIC OPTOELECTRONICS CO LTD
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