Graphite boat for coating of solar cell

Abstract

The invention discloses a graphite boat for coating of a solar cell. The graphite boat comprises first graphite boat pieces, second graphite boat pieces, ceramic rings, ceramic rods, graphite nuts andclamping points, wherein the first graphite boat pieces and the second graphite boat pieces are arranged alternately in parallel and are provided with through holes. The ceramic rings are arranged between the first graphite boat pieces and the second graphite boat pieces. The ceramic rods penetrate through the through holes and the ceramic rings. The two ends of the ceramic rods tighten the alternately and parallelly arranged first and second graphite boat pieces and the ceramic rings through the graphite nuts. The side wall of each ceramic ring is provided with at least two cleaning holes. The positions, holding silicon wafers, of the first graphite boat pieces and the second graphite boat pieces are provided with clamping point holes. The clamping points are arranged in the clamping point holes. Each ceramic rings are provided with two cleaning holes, thus the interiors of the ceramic rings can be cleaned when the graphite boat is cleaned, electric conduction between every two adjacent graphite boat pieces due to graphite powder is prevented effectively, and a coating effect is ensured.

Description

technical field [0001] The invention relates to the field of solar cell production, in particular to a graphite boat used for solar cell coating. Background technique [0002] The graphite boat is the carrier for coating the silicon wafers in the solar cells. When coating, the graphite boat inserted with the uncoated silicon wafers is sent into the chamber of the PECVD vacuum coating equipment and the PECVD process is used for discharge coating. After the coating is finished, take out the graphite boat, and unload the silicon wafer from the graphite boat. [0003] The current graphite boat is easy to touch the graphite boat due to the narrow storage space when placing and taking it out, which will cause fragments of the silicon wafer, and the graphite boat needs to be insulated during coating. Therefore, the graphite boat It needs to be cleaned after use. The two ends of the ceramic ring are always in contact with the graphite boat. After long-term use, the friction between...

AI Technical Summary

Problems solved by technology

[0003] The current graphite boat is easy to touch the graphite boat due to the narrow storage space when placing and taking it out, which will cause fragments of the silicon wafer, and the graphite boat needs to be insulated during coating. Therefore, the graphite boat It needs to be cleaned after use. The two ends of the ceramic ring are always in contact with the graphite boat. After long-term use, the friction between the graphite boat and the ceramic ring, ceramic rod, etc. produces graphite powder, which accumulates in the ceramic ring and cannot be removed. It will be a graphite boat. Conduction between sheets affects the coating effect; in addition, the current graphite boat has low production efficiency and a small number of coatings per time

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