Display panel, manufacturing method thereof and display device

Abstract

The invention discloses a display panel, a manufacturing method thereof and a display device. The display panel includes a substrate and a driving array layer; the driving array layer comprises a silicon transistor and an oxide transistor; the silicon transistor comprises a silicon active layer and a first grid electrode; the oxide transistor comprises an oxide active layer and a second grid electrode; the silicon active layer and the oxide active layer are arranged on the same layer; the driving array layer further comprises a silicon nitride gate insulating layer and a first silicon oxide gate insulating layer; at least one of the silicon nitride gate insulating layer and the first silicon oxide gate insulating layer is positioned on the surface, far away from the substrate, of the silicon active layer; the silicon nitride gate insulating layer comprises a first opening; the orthographic projection of the first opening on the substrate covers the orthographic projection of the oxideactive layer on the substrate; and the first silicon oxide gate insulating layer is further located on the surface, away from the substrate, of the oxide active layer. According to the display panel provided by the embodiment of the invention, the manufacturing difficulty of the display panel comprising two kinds of semiconductor material transistors is reduced.

Description

technical field [0001] The present invention relates to the display field, in particular to a display panel, a manufacturing method thereof, and a display device. Background technique [0002] Organic Light Emitting Display (OLED) display devices, as flat display devices, are widely used in mobile phones, televisions, and personal digital assistants due to their advantages of high image quality, power saving, thin body, and wide application range. , digital cameras, notebook computers, desktop computers and other consumer electronics products have become the mainstream of display devices. [0003] OLED display devices generally adopt an active matrix (AM) driving method, that is, an array substrate of an OLED display device includes a plurality of pixel driving units arranged in an array, and each pixel driving unit is used to drive a corresponding light-emitting element to emit light. Wherein, each pixel driving unit includes at least two transistors. For example, each pi...

AI Technical Summary

Problems solved by technology

[0004] However, in the prior art when manufacturing an array substrate including both silicon transistors and oxide transistors, it is usually to add a film layer for making oxide transistors on the basis of the original silicon transistors, so that the overall film layer thicker

When the via hole connected to the active layer of the silicon transistor is formed from the surface of the interlayer dielectric layer, the depth of the via hole is relatively large, which makes the process more difficult

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