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Compensation method and device for testing wavelength temperature drift based on Fabry-Perot etalon

A compensation method and technology of compensation device, which are applied in measurement devices, measurement optics, optical radiation measurement, etc., can solve the problem of low laser wavelength measurement accuracy, and achieve the improvement of wavelength measurement accuracy and stability, and improvement of accuracy and stability. Effects of stability and precision

Active Publication Date: 2020-04-17
RAINBOW SOURCE LASER RSLASER
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AI Technical Summary

Problems solved by technology

[0006] The embodiment of the present invention provides a method and device for compensating the temperature drift of the test wavelength based on the Faber etalon, so as to at least solve the technical problem of low measurement accuracy of the existing laser wavelength

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  • Compensation method and device for testing wavelength temperature drift based on Fabry-Perot etalon
  • Compensation method and device for testing wavelength temperature drift based on Fabry-Perot etalon
  • Compensation method and device for testing wavelength temperature drift based on Fabry-Perot etalon

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Embodiment 1

[0044] According to an embodiment of the present invention, a method for compensating the temperature drift of the test wavelength based on the Faber etalon is provided, see figure 1 , including the following steps:

[0045] S101: separating a part of the laser light emitted by the tunable laser;

[0046] S102: Absolute calibration is carried out to this part of the laser, and the outer shell temperature of the Faber etalon is T 0 , calculate the λ of the calibration wavelength 0 ; where λ 0 is the case temperature of the Fapper etalon is T 0 , the wavelength value of the absorption line of the hollow cathode lamp;

[0047] S103: Periodically collect the shell temperature T of the Faber etalon and measure the wavelength λ of the separated part of the laser using the Faber etalon, and smooth the acquired shell temperature T of the Perkin etalon, according to λ 0 , T 0 , λ, T correct the wavelength of the test to get the corrected wavelength λ corr .

[0048] The tempera...

Embodiment 2

[0061] According to another embodiment of the present invention, a kind of compensation device of the test wavelength temperature drift based on the Faber etalon is provided, see figure 2 ,include:

[0062] A laser separation unit 10, configured to separate a part of the laser light emitted by the laser;

[0063] Absolute wavelength calibration unit 20, comprising a Fappet etalon and a hollow cathode lamp, collects the test T of the Fappet etalon housing 0 , perform absolute calibration on the part of the separated laser light, and calculate the λ of the calibration wavelength 0 ; where λ 0 is the case temperature of the Fapper etalon is T 0 , the wavelength value of the absorption line of the hollow cathode lamp;

[0064] The Faper temperature drift feedback unit 30 is used to measure the shell temperature T of the Faper etalon and measure the wavelength λ of the separated laser light using the Faber etalon, and is also used to smooth the acquired temperature T, and acco...

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Abstract

The invention relates to the field of laser device wavelength detection and particularly relates to a compensation method and device for testing wavelength temperature drift based on a Fabry-Perot etalon. The method is characterized in that a part of laser emitted by a tunable laser device is separated out; absolute calibration of the part of laser is carried out, and lambda 0 and T0 of the calibration wavelength are calculated; the wavelength lambda and the shell temperature T of the Fabry-Perot etalon are obtained, and the tested wavelength is corrected according to the lambda 0, T0, lambdaand T to obtain a corrected wavelength lambda corr. The method is advantaged in that a Fabry-Perot temperature drift feedback mechanism is adopted, so the drift of the tested wavelength caused by thetemperature change of the Fabry-Perot etalon is compensated, and wavelength measurement precision and stability are improved; a hollow cathode lamp calibration mode is adopted, so absolute precision of the laser wavelength is ensured, and stability and precision of wavelength measurement are improved. The method is advantaged in that a problem that a temperature detection error of the Fabry-Perotetalon is equivalent to the amplitude of the temperature changing with the time is solved, and precision and stability of the central wavelength of the laser device are improved.

Description

technical field [0001] The invention relates to the field of laser wavelength detection, in particular to a method and device for compensating the temperature drift of the test wavelength based on a Faber etalon. Background technique [0002] In the wavelength full-scale calibration, the wavelength is generally measured accurately by using the Fap etalon, and the deviation between the measured value and the standard value measured by the wavelength meter is calculated in real time, forming a closed-loop feedback mechanism, and then controlling the wavelength value of the laser radiation. The error is within the accuracy of the measured value. However, due to the influence of laser radiation, ambient temperature and pressure, the temperature of the Fap etalon will change, and the density of the gas in the Fap etalon will also change due to the change of temperature, which will lead to a change in the refractive index and affect the Fapling interference fringes. distribution,...

Claims

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Application Information

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IPC IPC(8): G01J9/02H01S3/13
CPCG01J9/0246G01J2009/0257H01S3/13
Inventor 李亚飞刘广义江锐韩晓泉殷青青沙鹏飞冯泽斌
Owner RAINBOW SOURCE LASER RSLASER
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