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Pressure sensor and preparation method thereof

A technology of pressure sensor and prefabricated layer, which is applied in the sensor field and achieves the effect of simple preparation method

Pending Publication Date: 2020-04-17
INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the simple porous structure only improves the elasticity of the dielectric matrix and changes the effective dielectric constant of the dielectric matrix when the air is exhausted and sucked in, which is not the best way to effectively change the dielectric constant of the dielectric matrix

Method used

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  • Pressure sensor and preparation method thereof

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preparation example Construction

[0041] The present invention also provides a method for preparing the above-mentioned pressure sensor, comprising:

[0042] S1, mixing the matrix material, curing agent and porogen to obtain a mixture, and curing to obtain a prefabricated layer;

[0043] S2, removing the porogen in the prefabricated layer to form pores 12 in the prefabricated layer;

[0044] S3, providing a mixed solution containing a piezoelectric material, placing the prefabricated layer with the channel 12 in the mixed solution, so that the mixed solution enters the channel 12 and forms a piezoelectric material on the wall of the hole. Thin film layer 121, removing the surface layer of the prefabricated layer to form the base layer 11, so as to obtain the medium layer 1;

[0045] S4, forming a first electrode layer 21 and a second electrode layer 22 on the surfaces of the two opposite sides of the dielectric layer 1 to obtain a pressure sensor.

[0046] In step S1, the base material includes PDMS.

[004...

Embodiment 1

[0060] 10 g of the PDMS pre-matrix, 1 g of curing agent and 11 g of 100 micron salt particles were mixed and stirred evenly to obtain a mixture. The mixture was placed in a mold with a thickness of 3mm, and placed in a vacuum drying oven. Vacuum was applied until the air bubbles in the mixture disappeared. The temperature of the vacuum drying oven was set at 60°C, and the temperature was kept for 4 hours under vacuum conditions, so that the PDMS was cured and formed. Take out the mold and demould to obtain the prefabricated layer.

[0061] Place the prefabricated layer in a beaker with deionized water, place it in an ultrasonic cleaner, set the temperature at 25°C, and ultrasonically clean it for 6 hours to remove the salt particles in the prefabricated layer to form 100 micron channels in the prefabricated layer.

[0062] Fully dissolve the PVDF particles with DMF solution to obtain a mixed solution, the masses of which are 10 g and 1 g, respectively. Soak the prefabricated ...

Embodiment 2

[0065] Mix 10 g of PDMS prematrix, 1 g of curing agent, and 11 g of 200 micron NH 4 HCO 3 The granules are mixed and stirred well to obtain a mixture. The mixture was placed in a mold with a thickness of 4 mm, and placed in a vacuum drying oven. Vacuum was applied until the air bubbles in the mixture disappeared. The temperature of the vacuum drying oven was set at 80° C., and the temperature was kept under vacuum for 3 hours to make the PDMS solidify and form. Take out the mold and demould to obtain the prefabricated layer.

[0066] Place the prefabricated layer in a beaker with deionized water, place it in an ultrasonic cleaner, set the temperature at 50°C, and ultrasonically clean it for 5 hours to remove the salt particles in the prefabricated layer to form 200 micron channels in the prefabricated layer.

[0067] Fully dissolve the PVDF particles with DMF solution to obtain a mixed solution, the masses of which are 10 g and 1 g, respectively. Soak the prefabricated laye...

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Abstract

The invention relates to a pressure sensor and a preparation method thereof. The sensor comprises a dielectric layer, and a first electrode layer and a second electrode layer which are arranged on twoopposite sides of the dielectric layer, wherein the dielectric layer comprises a base body layer and a plurality of pore channels distributed in the base body layer, the pore channels are communicated with the outside so that air in the pore channels can be exhausted and sucked in, and piezoelectric film layers are further attached to the pore walls of the pore channels. According to the pressuresensor, through combination of the holes and the piezoelectric film layers, the detection sensitivity is higher. Meanwhile, the invention further provides a preparation method of the pressure sensor,and the preparation method is simple and suitable for industrial production.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a pressure sensor and a preparation method thereof. Background technique [0002] At present, the main method to improve the sensitivity of capacitive flexible pressure sensors is to prepare a highly elastic medium matrix with a porous structure, so that the sensor has high elasticity under pressure, and improve the sensitivity of capacitance under pressure changes. However, the simple porous structure only improves the elasticity of the dielectric substrate and changes the effective dielectric constant of the dielectric substrate when air is discharged and sucked in, which is not the best way to effectively change the dielectric constant of the dielectric substrate. Contents of the invention [0003] Based on this, it is necessary to provide a pressure sensor and a preparation method thereof for the above problems; the flexible pressure sensor has high sensitivity and a simple...

Claims

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Application Information

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IPC IPC(8): G01L9/12G01L19/00G01L1/14
CPCG01L9/12G01L1/142G01L19/0007
Inventor 冯雪王志建杜琦峰陈颖
Owner INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG
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