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A three-dimensional eddy current sensor measuring head

An eddy current sensor, eddy current technology, applied in electromagnetic measurement devices, electrical/magnetic solid deformation measurement, instruments, etc., can solve the problem of excessive axial size of eddy current sensors, and achieve the effect of shortening the axial size

Active Publication Date: 2021-06-22
陕西银辉精创科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a three-dimensional eddy current sensor measuring head to solve the technical problem of excessive axial dimension of the eddy current sensor in the prior art

Method used

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  • A three-dimensional eddy current sensor measuring head
  • A three-dimensional eddy current sensor measuring head
  • A three-dimensional eddy current sensor measuring head

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Embodiment Construction

[0017] An embodiment of a three-dimensional eddy current sensor measuring head is Figure 1~3 As shown: including the base, the three directions that define the vertical intersection of the space are X direction, Y direction and Z direction respectively, the base includes the bottom plate 6 whose rear end extends along the Z direction, and the plate thickness vertically fixed on the bottom plate 6 extends along the X direction The first vertical plate 11 and the second vertical plate 9 vertically fixed on the bottom plate and extending along the Y direction in thickness, the bottom plate 6, the first vertical plate 11 and the second vertical plate 9 are all made of metal. The bottoms of the first riser 11 and the second riser 9 are provided with a riser connecting edge 15 whose thickness extends along the Z direction, and the riser connecting edge 15 is fixed on the bottom plate 6 by screws. The lateral protrusion of the bottom plate 6 is provided with a bottom plate connectin...

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Abstract

The invention relates to a three-dimensional eddy current sensor measuring head, which includes a base, and defines three directions vertically intersecting the space as the X direction, the Y direction and the Z direction, and the base is fixed with a first PCB substrate and a second PCB which are perpendicular to each other. The substrate and the third PCB substrate. The inner sides of the three PCB substrates are respectively fixed with a first eddy current coil whose axis extends along the X direction, a second eddy current coil whose axis extends along the Y direction, and a third eddy current coil whose axis extends along the Z direction. For the coil, the axes of the three eddy current coils intersect vertically, and each PCB substrate is provided with two pad holes for welding and fixing the coil heads of the corresponding eddy current coils. The invention solves the technical problem that the axial size of the eddy current sensor is too large in the prior art.

Description

technical field [0001] The invention relates to a measuring head of a three-dimensional eddy current sensor in the technical field of displacement measurement sensors. Background technique [0002] At present, the mechanical equipment that industrial production relies on has higher and higher requirements for precision. For key components, it is well known that micron-level position changes can also cause serious problems. A typical example is CNC machine tools, which are the primary key research objects for the development strategy of a manufacturing power proposed in "Made in China 2025". For the multi-degree-of-freedom flexible processing high-end CNC machine tools produced by large international machine tool manufacturers, the accuracy requirements are often within 10 μm. However, as the thermal error caused by the thermal deformation of the machine tool can even reach 100 μm, the research on thermal error must rely on displacement sensors that can measure multi-dimensi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/24G01B7/02
CPCG01B7/02G01B7/24
Inventor 刘辉汪友明段章领王宁李红侯银龙张立银
Owner 陕西银辉精创科技有限公司