Ion beam etching preheating stabilizing device and ion beam etching preheating stabilizing method

Abstract

The invention relates to an ion beam etching preheating stabilizing device and an ion beam etching preheating stabilizing method. The device comprises a shielding baffle and a side face rotating support connected with the shielding baffle. The shielding baffle and the side rotating support are located in a vacuum chamber cabin door of an ion beam etching machine; the outer end of the side rotatingsupport is connected with a rotating operation rod, the outer section of the rotating operation rod is a threaded rod section, and the rotating operation rod penetrates through the outer wall of thevacuum chamber in a sealed mode and is adjustably and fixedly connected with the vacuum chamber cabin wall through a locking nut connected with the threaded rod section. When the shielding baffle rotates to the vertical state, the shielding baffle and the workbench are arranged in parallel, the shielding baffle is located right in front of the workbench and behind the ion output end of the ion source; when the shielding baffle rotates to the horizontal state, the shielding baffle is located above the workbench. The device is simple in structure and convenient to operate, the method is easy toimplement, and the problem that the groove etching depth of a machined part is out of tolerance is solved.

Description

technical field [0001] The invention belongs to the technical field of ion beam etching processing, and relates to ion beam etching preheating stabilization technology, in particular to an ion beam etching preheating stabilization device and an ion beam etching preheating stabilization method. Background technique [0002] A certain type of gyroscope uses a dynamic pressure air bearing motor, and the thrust plate of the motor is a key part of the thrust bearing. The uniformity of the groove depth of the spiral groove is an important parameter to realize an effective air bearing, which directly affects the support performance and operation stability of the motor. . At present, the spiral groove of the thrust plate of a certain type of gyro motor is processed by ion beam etching. [0003] The essence of ion beam etching is a processing method in which high-energy ion flow hits the surface of the part, and the atoms hit by the hit are separated from the body of the part. The ...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a preheating and stabilizing device for ion beam etching and a preheating and stabilizing method for ion beam etching. The device has a simple structure and is easy to operate, and the method is easy to implement. Solved the problem of the deep tolerance of the etched groove of the workpiece

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