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Open type sinking air floatation platform overhead floor overhanging vibration damping system

A raised floor and air-floating platform technology, which is applied to local raised floors, springs/shock absorbers, vibration suppression adjustment, etc. The effect of facilitating the organization of construction and reducing the difficulty of construction

Active Publication Date: 2020-05-15
CHINA IPPR INT ENG
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  • Abstract
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AI Technical Summary

Problems solved by technology

In the traditional scheme, the supporting structure of the raised floor is directly set on the foundation of the air flotation platform, and the external vibration on the upper part of the raised floor is directly transmitted to the top surface of the vibration isolation foundation through the supporting member of the raised floor. The transmission path of the external disturbance vibration is short, which seriously affects the air flotation vibration isolation system. The vibration isolation performance affects the performance of the vibration isolation system
[0004] 2. Strict construction sequence and long construction period
The construction of the vibration isolation platform and the raised floor in the traditional scheme has overlapping and crossing of the working interface, and the construction needs to be carried out in strict accordance with the order of building the air floating platform first and then the raised floor, and the construction cannot be carried out simultaneously, which increases the difficulty of construction, prolongs the construction period, and increases construction cost

Method used

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  • Open type sinking air floatation platform overhead floor overhanging vibration damping system

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Embodiment Construction

[0032] Open-type submerged air-floating platform overhead floor cantilever vibration reduction system, the system is proposed for the air-floating workbench, the ultra-precision air-floating workbench system is the core subsystem of the current precision semiconductor manufacturing equipment, etc., requiring nano-level repeated positioning precision and synchronous motion precision. Due to the design of air bearings, etc., the system will experience vibrations with amplitudes of nanometers, which will affect the accuracy of the system. Micro vibrations are not the "air hammer" phenomenon that occurs in traditional air bearings. Micro vibrations occur in the bearing itself. in normal working condition. When microvibration occurs, its amplitude is usually several nanometers to tens of nanometers, and its frequency is from tens of hertz to several thousand hertz. A distinctive feature of this vibration, which occurs only when the air bearing is ventilated, is a fluid-induced vib...

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Abstract

The invention provides an open type sinking air floatation platform overhead floor overhanging vibration damping system. The system comprises a vibration isolation platform (2) providing a support plane for upper equipment (1), a plurality of air spring vibration isolators (3) arranged below the vibration isolation platform (2), an overhead floor (4) in which a vibration isolation joint is left onthe side surface of the vibration isolation platform (2) and a gap is left on the top surface of a vibration isolation foundation of an air floatation platform and isolated from the air floatation platform and independent of each other, a supporting main steel beam (5) which is an overhanging type section steel member and used for supporting a supporting secondary steel beam (6) and the overheadfloor (4), the supporting secondary steel beam (6) which is a steel member, connected with the overhead floor (4) and used for supporting the overhead floor (4), and a concrete terrace (7) which is formed by indoor and outdoor terraces around the vibration isolation platform (2) and serves as an anchoring section for the supporting main steel beam (5), wherein one section of the supporting main steel beam (5) is anchored into the concrete terrace (7), so that a supporting structure formed by the overhead floor (4) is completely isolated from the air floatation vibration isolation platform.

Description

technical field [0001] The invention relates to and is applied to the technical field of engineering vibration and vibration reduction, in particular to a cantilevered vibration reduction system for a raised floor of an open sunken air-floating platform. Background technique [0002] At present, the support structure of the raised floor of the traditional open sunken air flotation platform is directly arranged on the upper part of the air flotation platform. Such a structure has the following defects: [0003] 1. The vibration isolation effect of the air flotation vibration isolation system is seriously disturbed by external vibration. In the traditional scheme, the supporting structure of the raised floor is directly set on the foundation of the air flotation platform, and the external vibration on the upper part of the raised floor is directly transmitted to the top surface of the vibration isolation foundation through the supporting member of the raised floor. The transmi...

Claims

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Application Information

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IPC IPC(8): F16F15/023E02D27/44E04F15/024
CPCF16F15/0232E02D27/44E04F15/024
Inventor 胡明祎王菲李康兰日清张瑞宇许岩杜林林
Owner CHINA IPPR INT ENG
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