Automatic reference edge searching and code reading equipment

Abstract

The invention provides automatic reference edge searching and code reading equipment which comprises a wafer loading-unloading device, a robot device and a reference edge searching and code reading device. The wafer loading-unloading device is used for placing a wafer delivery box and a wafer box; the robot device is used for grabbing and delivering wafers; the reference edge searching and code reading device is used for reading relevant information of the wafers and searching reference edges; the wafer loading-unloading device communicates with the reference edge searching and code reading device through the robot device; the wafers in the wafer delivery box on the wafer loading-unloading device are taken out and placed on the reference edge searching and code reading device; and after reference edge searching and code reading, the wafers are placed on the wafer box so as to be flipped and carried. The automatic reference edge searching and code reading equipment provided by the invention has the beneficial effects that reference edges can be automatically and accurately searched, marking labels can be automatically and accurately read, carrying and flipping can be carried out automatically and accurately, the risks of man-made misreading and granularity increasing are effectively avoided, the code reading efficiency is improved, the labor intensity is reduced, and the labor cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of silicon wafer production equipment, and in particular relates to an automatic reference code reading equipment. Background technique [0002] During the silicon wafer production process, handling is required. In silicon wafer handling, manual handling and hand-held reading are easy to produce particles and wrong data, resulting in low work efficiency and high labor intensity. Contents of the invention [0003] In view of the above problems, the problem to be solved by the present invention is to provide an automatic reference code reading device, which can be quickly transported through automated equipment, and can ensure cleanliness, improve the accuracy of information reading, and increase the degree of automation. [0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: an automatic reference code reading device, characterized in that it inc...

AI Technical Summary

Problems solved by technology

[0002] In the process of silicon wafer production, handling is required. In silicon wafer handling, manual handling and hand-held reading are easy to produce particles and wrong data, resulting in low work efficiency and high labor intensity.

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