Valve assembly

Abstract

The present invention relates to a valve assembly wherein the same can be easily installed in an exhaust line of a vacuum chamber, a valve constituting a part of the exhaust line is moved horizontallysuch that process contaminants and byproducts flowing into a gate valve can be blocked completely, and the same has an excellent exhaust effect. A valve assembly according to the present invention comprises: a valve housing installed such that, after removing a part of a vacuum chamber exhaust line, the valve housing is inserted into the removed part of the exhaust line, the valve housing being open in a communication direction of the exhaust line and having a predetermined inner space in a direction perpendicular to the communication direction; a valve installed inside the valve housing to be able to move horizontally and configured to allow the exhaust line to communicate or to block the same while moving horizontally inside the valve housing; a valve driving portion installed on one side of the valve housing and connected to the valve so as to horizontally move the valve in a direction perpendicular to the exhaust line; and a valve movement guide portion installed inside the valvehousing so as to guide the path of movement of the valve.

Description

technical field [0001] The present invention relates to a valve assembly, and more specifically, relates to an exhaust line that can be easily arranged in a vacuum chamber and the valve constitutes a part of the exhaust line so that the horizontal movement of the valve can completely block the engineering pollutants flowing into the interior of the gate valve and By-product valve combination with excellent venting effect. Background technique [0002] In precision manufacturing fields such as semiconductors, LCDs, LEDs, and solar cells, vacuum equipment that can keep the internal pressure of the equipment below atmospheric pressure during the manufacturing process is widely used. Such a vacuum device includes a vacuum pump for sucking and exhausting gas inside the vacuum device to maintain a low pressure inside the vacuum device, and an exhaust line connecting the vacuum pump and the vacuum device. [0003] In addition, a gate valve is provided on the exhaust line to open a...

AI Technical Summary

Problems solved by technology

[0005] However, the gate valve of this structure is as figure 1 As shown, the space between the valve 20 and the valve casing 40 in the gate valve is not blocked, and there is a problem that engineering by-products or pollutants 30 discharged through the exhaust line 10 accumulate inside the valve casing 40 and on the surface of the valve 20

[0006] Due to engineering by-products or pollutants 30 accumulating inside the valve housing 40 or on the valve 20, there is a fatal problem of poor drive and frequent maintenance due to corrosion of the valve housing 40 or valve 20, and exhaust capability due to unnecessary friction falling problem

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