Constant-temperature structure for high-performance humidity detection device and preparation method

Abstract

The invention discloses a constant-temperature structure for a high-performance humidity detection device and a preparation method. The temperature sensor comprises a top layer Al3N4 substrate (1). Afilm thermistor (2) is integrated on the upper surface of the top layer Al3N4 substrate (1), a TEC unit (3) is integrated on the lower surface of the top layer Al3N4 substrate (1), and a bottom layerAl3N4 substrate (4) is integrated on the lower surface of the TEC unit (3). An insulating medium layer (5) is integrated on the upper surface of the thin film thermistor (2), and a sensing signal processing chip (7) is pasted on the upper surface of the insulating medium layer (5) through a metallization layer (6). According to the invention, the temperature drift range of related performance parameter indexes of each component in the humidity-sensitive device can be reduced, temperature sensing devices such as an external thermal resistor are avoided, the assembly space of the external deviceis saved, and the miniaturization of assembly is better facilitated.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a constant temperature structure and a preparation method for a high-performance humidity detection device. Background technique [0002] The structure of the traditional humidity detection device is mainly to directly mount and paste the separated components such as the sensing signal processing chip, the humidity sensitive resistor, the metal welding area, and other active / passive components on the aluminum nitride ceramic substrate, and then perform circuit welding , to complete the circuit connection, its structure is as figure 1 shown. However, the humidity detection device with this structure has the following problems: when the whole device works in a natural environment, as the temperature changes, the electrical and physical properties of each component will change to a certain extent, thereby affecting the detection accuracy of humidity. At the same time, when some li...

AI Technical Summary

Problems solved by technology

However, the humidity detection device with this structure will have the following problems: when the whole device works in a natural environment, as the temperature changes, the electrical and physical properties of each component will change to a certain extent, thus affecting the detection accuracy of humidity

At the same time, when some limiting devices are used in high-reliability environments or in some special fields such as aerospace, aviation, ships, precision instruments, geological exploration, oil exploration, other field operations, communications, industrial control and other environments with complex temperature changes, in order to To ensure the accuracy of detection, it is necessary to add some bulky and expensive ambient temperature control devices for use

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