Deformable mirror surface shape design method and device for free-form surface measurement

Abstract

The invention discloses a deformable mirror surface shape design method and device for free-form surface measurement, and can solve the problem of deformable mirror surface shape constraint in a partial compensation method and realize high-precision detection of the surface shape of a free-form surface in a calibrated deformable mirror deformation range. The method comprises the following steps: (1) establishing an optical model of a deformable mirror-based free-form surface measurement system; (2) tracing incident light on the basis of a light tracing principle, and solving an image formed after the object passes through the whole system; (3) establishing an evaluation function of which the optimization target is aberration and the optimization variable is the surface shape of the deformable mirror, and constraining the stroke range of the deformable mirror; and (4) solving the deformable mirror surface shape based on a particle swarm optimization algorithm according to the imaging quality requirement of the imaging system.

Description

technical field [0001] The invention relates to the technical field of optical free-form surface measurement, in particular to a deformable mirror shape design method for free-form surface measurement and a deformable mirror shape design device for free-form surface measurement. Background technique [0002] Due to its arbitrary surface shape, the free-form surface can realize multiple functions on one surface at the same time. It has unparalleled advantages in correcting aberrations, so it is often used in optical imaging optical systems, especially free-form surface optical systems with off-axis catadioptric structures. The use of free-form surfaces in optical systems can also increase the degree of freedom of optical design, making optical design more possibilities. In addition, the free-form surface can simplify the structure of the optical system, reduce the number of optical elements, and then reduce the mass and volume of the system, which is conducive to improving t...

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Problems solved by technology

[0008] In order to overcome the defects of the prior art, the technical problem to be solved in the present invention is to provide a deformable mirror shape design method for free-form surface measurement, which can solve the problem of deformable mirror shape constraints in the partial compensation method. Within the deformation range of the deformable mirror, the high-precision detection of the free-form surface shape is realized

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