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Dark field confocal microscopic measurement device and method based on polarization autocorrelation

A confocal microscopy and measuring device technology, applied in measuring devices, microscopes, optical devices, etc., can solve the problems of low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, etc., and achieve the effect of nano-scale defect measurement.

Active Publication Date: 2020-06-09
NANJING HENGRUI PRECISION INSTR CO LTD
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Problems solved by technology

Its ubiquitous shortcomings are low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, and limited detection samples.

Method used

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  • Dark field confocal microscopic measurement device and method based on polarization autocorrelation
  • Dark field confocal microscopic measurement device and method based on polarization autocorrelation
  • Dark field confocal microscopic measurement device and method based on polarization autocorrelation

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Embodiment Construction

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0037] The embodiment of the present invention discloses a dark-field confocal microscopic measurement device based on polarization autocorrelation, including: a polarization ring light illumination module, a polarization ring light scanning module, and a confocal polarization analyzer detection module;

[0038] The polarized ring light illumination module sequentially includes a laser 1, a beam expander 2, a polarizer 3, a concave axicon lens 4 and a semi-refl...

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Abstract

The invention discloses a dark field confocal microscopic measurement device and method based on polarization autocorrelation. The device comprises a polarization annular light illumination module, apolarization annular light scanning module and a confocal polarization detection module. A sample surface reflection signal and a subsurface scattering signal are effectively separated through illumination beam shaping and complementary aperture shielding detection, three-dimensional distribution information of nanoscale surface scratches, abrasion, subsurface cracks, bubbles and other defects canbe obtained at the same time, and the function of integrated detection of surface and subsurface defects is achieved. Meanwhile, polarity scattering and autocorrelation cumulant difference of adjacent observation points are generated by exciting single-wave vector illumination light fields in different directions by utilizing asymmetry of a sample structure so that super-resolution measurement isrealized. The device and the method have the advantage that nanoscale subsurface three-dimensional defect detection can be achieved.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to a dark-field confocal microscopic measurement device and method based on polarization autocorrelation. Background technique [0002] High-performance optical components and micro-electromechanical components are the core components of modern high-end equipment. In order to ensure their processing quality and service reliability, it is necessary to perform surface topography measurement and sub-surface defect detection. At present, there is no equipment at home and abroad that can simultaneously achieve the above Function. [0003] The existing non-destructive measurement technology of surface topography at home and abroad mainly includes: confocal microscopic measurement technology, white light interference microscopic measurement technology and zoom microscopic measurement technology. Compared with the other two techniques, the confocal microscopic measure...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01B11/24G01N21/88G02B21/00G02B21/08
CPCG01N21/01G01B11/24G01N21/88G02B21/0032G02B21/0048G02B21/0068G02B21/08
Inventor 刘辰光刘俭陈刚
Owner NANJING HENGRUI PRECISION INSTR CO LTD
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